6/14/2010	10:17:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/14/2010	10:17:58 AM	Recipe started at 10:17 AM
6/14/2010	10:17:58 AM	H2 valve closed
6/14/2010	10:17:58 AM	BCl3 valve closed
6/14/2010	10:17:58 AM	PH3 valve closed
6/14/2010	10:17:58 AM	SiCl4 pre valve closed
6/14/2010	10:17:58 AM	SiCl4 post valve closed
6/14/2010	10:17:58 AM	Main Vac valve closed
6/14/2010	10:17:58 AM	Bypass valve closed
6/14/2010	10:17:58 AM	Bubbler valve closed
6/14/2010	10:17:58 AM	Helium valve opened
6/14/2010	10:17:58 AM	Helium MFC set to  500.000000
6/14/2010	10:17:58 AM	H2 MFC set to  0.000000
6/14/2010	10:17:58 AM	BCl3 MFC set to  0.000000
6/14/2010	10:17:58 AM	PHl3 MFC set to  0.000000
6/14/2010	10:17:58 AM	SiCl4 MFC set to  0.000000
6/14/2010	10:17:58 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:17:58 AM	Tube furnace set to 0
6/14/2010	10:21:28 AM	Helium valve closed
6/14/2010	10:21:28 AM	H2 valve closed
6/14/2010	10:21:28 AM	BCl3 valve closed
6/14/2010	10:21:28 AM	PH3 valve closed
6/14/2010	10:21:28 AM	SiCl4 pre valve closed
6/14/2010	10:21:28 AM	SiCl4 post valve closed
6/14/2010	10:21:28 AM	Main Vac valve closed
6/14/2010	10:21:28 AM	Bypass valve closed
6/14/2010	10:21:28 AM	Bubbler valve closed
6/14/2010	10:21:28 AM	Helium MFC set to  0.000000
6/14/2010	10:21:28 AM	H2 MFC set to  0.000000
6/14/2010	10:21:28 AM	BCl3 MFC set to  0.000000
6/14/2010	10:21:28 AM	PHl3 MFC set to  0.000000
6/14/2010	10:21:28 AM	SiCl4 MFC set to  0.000000
6/14/2010	10:21:28 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:21:28 AM	Tube furnace set to 0
6/14/2010	10:21:28 AM	Run finished at 10:21 AM
6/14/2010	10:21:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/14/2010	10:35:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/14/2010	10:35:44 AM	Recipe started at 10:35 AM
6/14/2010	10:35:44 AM	H2 valve closed
6/14/2010	10:35:44 AM	BCl3 valve closed
6/14/2010	10:35:44 AM	PH3 valve closed
6/14/2010	10:35:44 AM	SiCl4 pre valve closed
6/14/2010	10:35:44 AM	SiCl4 post valve closed
6/14/2010	10:35:44 AM	Main Vac valve closed
6/14/2010	10:35:44 AM	Bypass valve closed
6/14/2010	10:35:44 AM	Bubbler valve closed
6/14/2010	10:35:44 AM	Helium valve opened
6/14/2010	10:35:44 AM	Helium MFC set to  500.000000
6/14/2010	10:35:44 AM	H2 MFC set to  0.000000
6/14/2010	10:35:44 AM	BCl3 MFC set to  0.000000
6/14/2010	10:35:44 AM	PHl3 MFC set to  0.000000
6/14/2010	10:35:44 AM	SiCl4 MFC set to  0.000000
6/14/2010	10:35:44 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:35:44 AM	Tube furnace set to 0
6/14/2010	10:37:02 AM	Helium valve closed
6/14/2010	10:37:02 AM	H2 valve closed
6/14/2010	10:37:02 AM	BCl3 valve closed
6/14/2010	10:37:02 AM	PH3 valve closed
6/14/2010	10:37:02 AM	SiCl4 pre valve closed
6/14/2010	10:37:02 AM	SiCl4 post valve closed
6/14/2010	10:37:02 AM	Main Vac valve closed
6/14/2010	10:37:02 AM	Bypass valve closed
6/14/2010	10:37:02 AM	Bubbler valve closed
6/14/2010	10:37:02 AM	Helium MFC set to  0.000000
6/14/2010	10:37:02 AM	H2 MFC set to  0.000000
6/14/2010	10:37:02 AM	BCl3 MFC set to  0.000000
6/14/2010	10:37:02 AM	PHl3 MFC set to  0.000000
6/14/2010	10:37:02 AM	SiCl4 MFC set to  0.000000
6/14/2010	10:37:02 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:37:02 AM	Tube furnace set to 0
6/14/2010	10:37:03 AM	Run finished at 10:37 AM
6/14/2010	10:37:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/14/2010	10:46:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	10:46:49 AM	Recipe started at 10:46 AM
6/14/2010	10:46:49 AM	Helium valve closed
6/14/2010	10:46:49 AM	H2 valve closed
6/14/2010	10:46:49 AM	BCl3 valve closed
6/14/2010	10:46:49 AM	PH3 valve closed
6/14/2010	10:46:49 AM	SiCl4 pre valve closed
6/14/2010	10:46:49 AM	SiCl4 post valve closed
6/14/2010	10:46:49 AM	Main Vac valve closed
6/14/2010	10:46:49 AM	Bubbler valve closed
6/14/2010	10:46:49 AM	Bypass valve opened
6/14/2010	10:46:49 AM	Helium MFC set to  0.000000
6/14/2010	10:46:49 AM	H2 MFC set to  0.000000
6/14/2010	10:46:49 AM	BCl3 MFC set to  0.000000
6/14/2010	10:46:49 AM	PHl3 MFC set to  0.000000
6/14/2010	10:46:49 AM	SiCl4 MFC set to  0.000000
6/14/2010	10:46:49 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:46:50 AM	Tube furnace set to 0
6/14/2010	10:47:37 AM	Helium valve closed
6/14/2010	10:47:37 AM	H2 valve closed
6/14/2010	10:47:37 AM	BCl3 valve closed
6/14/2010	10:47:37 AM	PH3 valve closed
6/14/2010	10:47:37 AM	SiCl4 pre valve closed
6/14/2010	10:47:37 AM	SiCl4 post valve closed
6/14/2010	10:47:37 AM	Bubbler valve closed
6/14/2010	10:47:37 AM	Main Vac valve opened
6/14/2010	10:47:37 AM	Bypass valve opened
6/14/2010	10:47:37 AM	Helium MFC set to  0.000000
6/14/2010	10:47:37 AM	H2 MFC set to  0.000000
6/14/2010	10:47:37 AM	BCl3 MFC set to  0.000000
6/14/2010	10:47:37 AM	PHl3 MFC set to  0.000000
6/14/2010	10:47:37 AM	SiCl4 MFC set to  0.000000
6/14/2010	10:47:37 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:47:37 AM	Tube furnace set to 0
6/14/2010	10:47:38 AM	Run finished at 10:47 AM
6/14/2010	10:47:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	11:04:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/14/2010	11:04:12 AM	Recipe started at 11:04 AM
6/14/2010	11:04:12 AM	H2 valve closed
6/14/2010	11:04:12 AM	BCl3 valve closed
6/14/2010	11:04:12 AM	PH3 valve closed
6/14/2010	11:04:12 AM	SiCl4 pre valve closed
6/14/2010	11:04:12 AM	SiCl4 post valve closed
6/14/2010	11:04:12 AM	Main Vac valve closed
6/14/2010	11:04:12 AM	Bypass valve closed
6/14/2010	11:04:12 AM	Bubbler valve closed
6/14/2010	11:04:12 AM	Helium valve opened
6/14/2010	11:04:12 AM	Helium MFC set to  500.000000
6/14/2010	11:04:12 AM	H2 MFC set to  0.000000
6/14/2010	11:04:12 AM	BCl3 MFC set to  0.000000
6/14/2010	11:04:12 AM	PHl3 MFC set to  0.000000
6/14/2010	11:04:12 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:04:12 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:04:12 AM	Tube furnace set to 0
6/14/2010	11:04:16 AM	Run aborted at 11:04 AM
6/14/2010	11:04:16 AM	Helium valve closed
6/14/2010	11:04:16 AM	H2 valve closed
6/14/2010	11:04:16 AM	BCl3 valve closed
6/14/2010	11:04:16 AM	PH3 valve closed
6/14/2010	11:04:16 AM	SiCl4 pre valve closed
6/14/2010	11:04:16 AM	SiCl4 post valve closed
6/14/2010	11:04:16 AM	Bypass valve closed
6/14/2010	11:04:16 AM	Main Vac valve closed
6/14/2010	11:04:16 AM	Bubbler valve closed
6/14/2010	11:04:16 AM	Helium MFC set to  0.000000
6/14/2010	11:04:16 AM	H2 MFC set to  0.000000
6/14/2010	11:04:16 AM	BCl3 MFC set to  0.000000
6/14/2010	11:04:16 AM	PHl3 MFC set to  0.000000
6/14/2010	11:04:16 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:04:16 AM	Tube furnace set to 0
6/14/2010	11:04:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/14/2010	11:10:42 AM	Helium valve closed
6/14/2010	11:10:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	11:10:47 AM	Recipe started at 11:10 AM
6/14/2010	11:10:47 AM	Helium valve closed
6/14/2010	11:10:47 AM	H2 valve closed
6/14/2010	11:10:47 AM	BCl3 valve closed
6/14/2010	11:10:47 AM	PH3 valve closed
6/14/2010	11:10:47 AM	SiCl4 pre valve closed
6/14/2010	11:10:47 AM	SiCl4 post valve closed
6/14/2010	11:10:47 AM	Main Vac valve closed
6/14/2010	11:10:47 AM	Bubbler valve closed
6/14/2010	11:10:47 AM	Bypass valve opened
6/14/2010	11:10:47 AM	Helium MFC set to  0.000000
6/14/2010	11:10:47 AM	H2 MFC set to  0.000000
6/14/2010	11:10:47 AM	BCl3 MFC set to  0.000000
6/14/2010	11:10:47 AM	PHl3 MFC set to  0.000000
6/14/2010	11:10:47 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:10:47 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:10:47 AM	Tube furnace set to 0
6/14/2010	11:10:47 AM	Helium valve closed
6/14/2010	11:10:47 AM	H2 valve closed
6/14/2010	11:10:47 AM	BCl3 valve closed
6/14/2010	11:10:47 AM	PH3 valve closed
6/14/2010	11:10:47 AM	SiCl4 pre valve closed
6/14/2010	11:10:47 AM	SiCl4 post valve closed
6/14/2010	11:10:47 AM	Bubbler valve closed
6/14/2010	11:10:47 AM	Main Vac valve opened
6/14/2010	11:10:47 AM	Bypass valve opened
6/14/2010	11:10:47 AM	Helium MFC set to  0.000000
6/14/2010	11:10:47 AM	H2 MFC set to  0.000000
6/14/2010	11:10:47 AM	BCl3 MFC set to  0.000000
6/14/2010	11:10:47 AM	PHl3 MFC set to  0.000000
6/14/2010	11:10:47 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:10:47 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:10:48 AM	Tube furnace set to 0
6/14/2010	11:10:48 AM	Run finished at 11:10 AM
6/14/2010	11:10:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	11:11:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/14/2010	11:11:37 AM	Recipe started at 11:11 AM
6/14/2010	11:11:37 AM	H2 valve closed
6/14/2010	11:11:37 AM	BCl3 valve closed
6/14/2010	11:11:37 AM	PH3 valve closed
6/14/2010	11:11:37 AM	SiCl4 pre valve closed
6/14/2010	11:11:37 AM	SiCl4 post valve closed
6/14/2010	11:11:37 AM	Main Vac valve closed
6/14/2010	11:11:37 AM	Bypass valve closed
6/14/2010	11:11:37 AM	Bubbler valve closed
6/14/2010	11:11:37 AM	Helium valve opened
6/14/2010	11:11:37 AM	Helium MFC set to  500.000000
6/14/2010	11:11:37 AM	H2 MFC set to  0.000000
6/14/2010	11:11:37 AM	BCl3 MFC set to  0.000000
6/14/2010	11:11:37 AM	PHl3 MFC set to  0.000000
6/14/2010	11:11:37 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:11:37 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:11:38 AM	Tube furnace set to 0
6/14/2010	11:13:00 AM	Helium valve closed
6/14/2010	11:13:00 AM	H2 valve closed
6/14/2010	11:13:00 AM	BCl3 valve closed
6/14/2010	11:13:00 AM	PH3 valve closed
6/14/2010	11:13:00 AM	SiCl4 pre valve closed
6/14/2010	11:13:00 AM	SiCl4 post valve closed
6/14/2010	11:13:00 AM	Main Vac valve closed
6/14/2010	11:13:00 AM	Bypass valve closed
6/14/2010	11:13:00 AM	Bubbler valve closed
6/14/2010	11:13:00 AM	Helium MFC set to  0.000000
6/14/2010	11:13:00 AM	H2 MFC set to  0.000000
6/14/2010	11:13:00 AM	BCl3 MFC set to  0.000000
6/14/2010	11:13:00 AM	PHl3 MFC set to  0.000000
6/14/2010	11:13:00 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:13:00 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:13:00 AM	Tube furnace set to 0
6/14/2010	11:13:15 AM	Helium valve closed
6/14/2010	11:13:15 AM	H2 valve closed
6/14/2010	11:13:15 AM	BCl3 valve closed
6/14/2010	11:13:15 AM	PH3 valve closed
6/14/2010	11:13:15 AM	SiCl4 pre valve closed
6/14/2010	11:13:15 AM	SiCl4 post valve closed
6/14/2010	11:13:15 AM	Main Vac valve closed
6/14/2010	11:13:15 AM	Bubbler valve closed
6/14/2010	11:13:15 AM	Bypass valve opened
6/14/2010	11:13:15 AM	Helium MFC set to  0.000000
6/14/2010	11:13:15 AM	H2 MFC set to  0.000000
6/14/2010	11:13:15 AM	BCl3 MFC set to  0.000000
6/14/2010	11:13:15 AM	PHl3 MFC set to  0.000000
6/14/2010	11:13:15 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:13:15 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:13:15 AM	Tube furnace set to 0
6/14/2010	11:13:49 AM	Helium valve closed
6/14/2010	11:13:49 AM	H2 valve closed
6/14/2010	11:13:49 AM	BCl3 valve closed
6/14/2010	11:13:49 AM	PH3 valve closed
6/14/2010	11:13:49 AM	SiCl4 pre valve closed
6/14/2010	11:13:49 AM	SiCl4 post valve closed
6/14/2010	11:13:49 AM	Bubbler valve closed
6/14/2010	11:13:49 AM	Main Vac valve opened
6/14/2010	11:13:49 AM	Bypass valve opened
6/14/2010	11:13:49 AM	Helium MFC set to  0.000000
6/14/2010	11:13:49 AM	H2 MFC set to  0.000000
6/14/2010	11:13:49 AM	BCl3 MFC set to  0.000000
6/14/2010	11:13:49 AM	PHl3 MFC set to  0.000000
6/14/2010	11:13:49 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:13:49 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:13:49 AM	Tube furnace set to 0
6/14/2010	11:18:49 AM	H2 valve closed
6/14/2010	11:18:49 AM	BCl3 valve closed
6/14/2010	11:18:49 AM	PH3 valve closed
6/14/2010	11:18:49 AM	SiCl4 pre valve closed
6/14/2010	11:18:49 AM	SiCl4 post valve closed
6/14/2010	11:18:49 AM	Main Vac valve closed
6/14/2010	11:18:49 AM	Bypass valve closed
6/14/2010	11:18:49 AM	Bubbler valve closed
6/14/2010	11:18:49 AM	Helium valve opened
6/14/2010	11:18:49 AM	Helium MFC set to  500.000000
6/14/2010	11:18:49 AM	H2 MFC set to  0.000000
6/14/2010	11:18:49 AM	BCl3 MFC set to  0.000000
6/14/2010	11:18:49 AM	PHl3 MFC set to  0.000000
6/14/2010	11:18:49 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:18:49 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:18:49 AM	Tube furnace set to 0
6/14/2010	11:20:11 AM	Helium valve closed
6/14/2010	11:20:11 AM	H2 valve closed
6/14/2010	11:20:11 AM	BCl3 valve closed
6/14/2010	11:20:11 AM	PH3 valve closed
6/14/2010	11:20:11 AM	SiCl4 pre valve closed
6/14/2010	11:20:11 AM	SiCl4 post valve closed
6/14/2010	11:20:11 AM	Main Vac valve closed
6/14/2010	11:20:11 AM	Bypass valve closed
6/14/2010	11:20:11 AM	Bubbler valve closed
6/14/2010	11:20:11 AM	Helium MFC set to  0.000000
6/14/2010	11:20:11 AM	H2 MFC set to  0.000000
6/14/2010	11:20:11 AM	BCl3 MFC set to  0.000000
6/14/2010	11:20:11 AM	PHl3 MFC set to  0.000000
6/14/2010	11:20:11 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:20:11 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:20:12 AM	Tube furnace set to 0
6/14/2010	11:20:27 AM	Helium valve closed
6/14/2010	11:20:27 AM	H2 valve closed
6/14/2010	11:20:27 AM	BCl3 valve closed
6/14/2010	11:20:27 AM	PH3 valve closed
6/14/2010	11:20:27 AM	SiCl4 pre valve closed
6/14/2010	11:20:27 AM	SiCl4 post valve closed
6/14/2010	11:20:27 AM	Main Vac valve closed
6/14/2010	11:20:27 AM	Bubbler valve closed
6/14/2010	11:20:27 AM	Bypass valve opened
6/14/2010	11:20:27 AM	Helium MFC set to  0.000000
6/14/2010	11:20:27 AM	H2 MFC set to  0.000000
6/14/2010	11:20:27 AM	BCl3 MFC set to  0.000000
6/14/2010	11:20:27 AM	PHl3 MFC set to  0.000000
6/14/2010	11:20:27 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:20:27 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:20:27 AM	Tube furnace set to 0
6/14/2010	11:21:00 AM	Helium valve closed
6/14/2010	11:21:00 AM	H2 valve closed
6/14/2010	11:21:00 AM	BCl3 valve closed
6/14/2010	11:21:00 AM	PH3 valve closed
6/14/2010	11:21:00 AM	SiCl4 pre valve closed
6/14/2010	11:21:00 AM	SiCl4 post valve closed
6/14/2010	11:21:00 AM	Bubbler valve closed
6/14/2010	11:21:00 AM	Main Vac valve opened
6/14/2010	11:21:00 AM	Bypass valve opened
6/14/2010	11:21:00 AM	Helium MFC set to  0.000000
6/14/2010	11:21:00 AM	H2 MFC set to  0.000000
6/14/2010	11:21:00 AM	BCl3 MFC set to  0.000000
6/14/2010	11:21:00 AM	PHl3 MFC set to  0.000000
6/14/2010	11:21:00 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:21:00 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:21:00 AM	Tube furnace set to 0
6/14/2010	11:26:00 AM	H2 valve closed
6/14/2010	11:26:00 AM	BCl3 valve closed
6/14/2010	11:26:00 AM	PH3 valve closed
6/14/2010	11:26:00 AM	SiCl4 pre valve closed
6/14/2010	11:26:00 AM	SiCl4 post valve closed
6/14/2010	11:26:00 AM	Main Vac valve closed
6/14/2010	11:26:00 AM	Bypass valve closed
6/14/2010	11:26:00 AM	Bubbler valve closed
6/14/2010	11:26:00 AM	Helium valve opened
6/14/2010	11:26:00 AM	Helium MFC set to  500.000000
6/14/2010	11:26:00 AM	H2 MFC set to  0.000000
6/14/2010	11:26:00 AM	BCl3 MFC set to  0.000000
6/14/2010	11:26:00 AM	PHl3 MFC set to  0.000000
6/14/2010	11:26:00 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:26:00 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:26:01 AM	Tube furnace set to 0
6/14/2010	11:27:23 AM	Helium valve closed
6/14/2010	11:27:23 AM	H2 valve closed
6/14/2010	11:27:23 AM	BCl3 valve closed
6/14/2010	11:27:23 AM	PH3 valve closed
6/14/2010	11:27:23 AM	SiCl4 pre valve closed
6/14/2010	11:27:23 AM	SiCl4 post valve closed
6/14/2010	11:27:23 AM	Main Vac valve closed
6/14/2010	11:27:23 AM	Bypass valve closed
6/14/2010	11:27:23 AM	Bubbler valve closed
6/14/2010	11:27:23 AM	Helium MFC set to  0.000000
6/14/2010	11:27:23 AM	H2 MFC set to  0.000000
6/14/2010	11:27:23 AM	BCl3 MFC set to  0.000000
6/14/2010	11:27:23 AM	PHl3 MFC set to  0.000000
6/14/2010	11:27:23 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:27:23 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:27:23 AM	Tube furnace set to 0
6/14/2010	11:27:38 AM	Helium valve closed
6/14/2010	11:27:38 AM	H2 valve closed
6/14/2010	11:27:38 AM	BCl3 valve closed
6/14/2010	11:27:38 AM	PH3 valve closed
6/14/2010	11:27:38 AM	SiCl4 pre valve closed
6/14/2010	11:27:38 AM	SiCl4 post valve closed
6/14/2010	11:27:38 AM	Main Vac valve closed
6/14/2010	11:27:38 AM	Bubbler valve closed
6/14/2010	11:27:38 AM	Bypass valve opened
6/14/2010	11:27:38 AM	Helium MFC set to  0.000000
6/14/2010	11:27:38 AM	H2 MFC set to  0.000000
6/14/2010	11:27:38 AM	BCl3 MFC set to  0.000000
6/14/2010	11:27:38 AM	PHl3 MFC set to  0.000000
6/14/2010	11:27:38 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:27:38 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:27:38 AM	Tube furnace set to 0
6/14/2010	11:28:12 AM	Helium valve closed
6/14/2010	11:28:12 AM	H2 valve closed
6/14/2010	11:28:12 AM	BCl3 valve closed
6/14/2010	11:28:12 AM	PH3 valve closed
6/14/2010	11:28:12 AM	SiCl4 pre valve closed
6/14/2010	11:28:12 AM	SiCl4 post valve closed
6/14/2010	11:28:12 AM	Bubbler valve closed
6/14/2010	11:28:12 AM	Main Vac valve opened
6/14/2010	11:28:12 AM	Bypass valve opened
6/14/2010	11:28:12 AM	Helium MFC set to  0.000000
6/14/2010	11:28:12 AM	H2 MFC set to  0.000000
6/14/2010	11:28:12 AM	BCl3 MFC set to  0.000000
6/14/2010	11:28:12 AM	PHl3 MFC set to  0.000000
6/14/2010	11:28:12 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:28:12 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:28:12 AM	Tube furnace set to 0
6/14/2010	11:33:12 AM	Helium valve closed
6/14/2010	11:33:12 AM	H2 valve closed
6/14/2010	11:33:12 AM	BCl3 valve closed
6/14/2010	11:33:12 AM	PH3 valve closed
6/14/2010	11:33:12 AM	SiCl4 pre valve closed
6/14/2010	11:33:12 AM	SiCl4 post valve closed
6/14/2010	11:33:12 AM	Bubbler valve closed
6/14/2010	11:33:12 AM	Main Vac valve opened
6/14/2010	11:33:12 AM	Bypass valve opened
6/14/2010	11:33:12 AM	Helium MFC set to  0.000000
6/14/2010	11:33:12 AM	H2 MFC set to  0.000000
6/14/2010	11:33:12 AM	BCl3 MFC set to  0.000000
6/14/2010	11:33:12 AM	PHl3 MFC set to  0.000000
6/14/2010	11:33:12 AM	SiCl4 MFC set to  0.000000
6/14/2010	11:33:12 AM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:33:12 AM	Tube furnace set to 0
6/14/2010	11:33:13 AM	Run finished at 11:33 AM
6/14/2010	11:33:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/14/2010	1:06:01 PM	Main Vac valve closed
6/14/2010	1:06:03 PM	Bypass valve closed
6/14/2010	1:06:19 PM	Main Vac valve opened
6/14/2010	1:06:21 PM	Bypass valve opened
6/14/2010	1:07:17 PM	Recipe started at 1:07 PM
6/14/2010	1:07:17 PM	Helium valve closed
6/14/2010	1:07:17 PM	BCl3 valve closed
6/14/2010	1:07:17 PM	PH3 valve closed
6/14/2010	1:07:17 PM	SiCl4 pre valve closed
6/14/2010	1:07:17 PM	SiCl4 post valve closed
6/14/2010	1:07:17 PM	Main Vac valve closed
6/14/2010	1:07:17 PM	Bypass valve closed
6/14/2010	1:07:17 PM	Bubbler valve closed
6/14/2010	1:07:17 PM	H2 valve opened
6/14/2010	1:07:17 PM	Helium MFC set to  0.000000
6/14/2010	1:07:17 PM	H2 MFC set to  500.000000
6/14/2010	1:07:17 PM	BCl3 MFC set to  0.000000
6/14/2010	1:07:17 PM	PHl3 MFC set to  0.000000
6/14/2010	1:07:17 PM	SiCl4 MFC set to  0.000000
6/14/2010	1:07:17 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	1:07:17 PM	Tube furnace set to 0
6/14/2010	1:08:39 PM	Helium valve closed
6/14/2010	1:08:39 PM	BCl3 valve closed
6/14/2010	1:08:39 PM	PH3 valve closed
6/14/2010	1:08:39 PM	SiCl4 pre valve closed
6/14/2010	1:08:39 PM	SiCl4 post valve closed
6/14/2010	1:08:39 PM	Main Vac valve closed
6/14/2010	1:08:39 PM	Bypass valve closed
6/14/2010	1:08:39 PM	H2 valve opened
6/14/2010	1:08:39 PM	Bubbler valve opened
6/14/2010	1:08:39 PM	Helium MFC set to  0.000000
6/14/2010	1:08:39 PM	H2 MFC set to  500.000000
6/14/2010	1:08:39 PM	BCl3 MFC set to  0.000000
6/14/2010	1:08:39 PM	PHl3 MFC set to  0.000000
6/14/2010	1:08:39 PM	SiCl4 MFC set to  0.000000
6/14/2010	1:08:39 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	1:08:39 PM	Tube furnace set to 1000
6/14/2010	1:28:39 PM	Helium valve closed
6/14/2010	1:28:39 PM	BCl3 valve closed
6/14/2010	1:28:39 PM	Main Vac valve closed
6/14/2010	1:28:39 PM	Bypass valve closed
6/14/2010	1:28:39 PM	H2 valve opened
6/14/2010	1:28:39 PM	PH3 valve opened
6/14/2010	1:28:39 PM	SiCl4 pre valve opened
6/14/2010	1:28:39 PM	SiCl4 post valve opened
6/14/2010	1:28:39 PM	Bubbler valve opened
6/14/2010	1:28:39 PM	Helium MFC set to  0.000000
6/14/2010	1:28:39 PM	H2 MFC set to  500.000000
6/14/2010	1:28:39 PM	BCl3 MFC set to  0.000000
6/14/2010	1:28:39 PM	PHl3 MFC set to  1.000000
6/14/2010	1:28:39 PM	SiCl4 MFC set to  50.000000
6/14/2010	1:28:39 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	1:28:39 PM	Tube furnace set to 1000
6/14/2010	1:48:39 PM	H2 valve closed
6/14/2010	1:48:39 PM	BCl3 valve closed
6/14/2010	1:48:39 PM	PH3 valve closed
6/14/2010	1:48:39 PM	SiCl4 pre valve closed
6/14/2010	1:48:39 PM	SiCl4 post valve closed
6/14/2010	1:48:39 PM	Main Vac valve closed
6/14/2010	1:48:39 PM	Bypass valve closed
6/14/2010	1:48:39 PM	Helium valve opened
6/14/2010	1:48:39 PM	Bubbler valve opened
6/14/2010	1:48:39 PM	Helium MFC set to  500.000000
6/14/2010	1:48:39 PM	H2 MFC set to  0.000000
6/14/2010	1:48:39 PM	BCl3 MFC set to  0.000000
6/14/2010	1:48:39 PM	PHl3 MFC set to  0.000000
6/14/2010	1:48:39 PM	SiCl4 MFC set to  0.000000
6/14/2010	1:48:39 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	1:48:40 PM	Tube furnace set to 0
6/14/2010	2:08:40 PM	Helium valve closed
6/14/2010	2:08:40 PM	H2 valve closed
6/14/2010	2:08:40 PM	BCl3 valve closed
6/14/2010	2:08:40 PM	PH3 valve closed
6/14/2010	2:08:40 PM	SiCl4 pre valve closed
6/14/2010	2:08:40 PM	SiCl4 post valve closed
6/14/2010	2:08:40 PM	Main Vac valve closed
6/14/2010	2:08:40 PM	Bypass valve closed
6/14/2010	2:08:40 PM	Bubbler valve closed
6/14/2010	2:08:40 PM	Helium MFC set to  0.000000
6/14/2010	2:08:40 PM	H2 MFC set to  0.000000
6/14/2010	2:08:40 PM	BCl3 MFC set to  0.000000
6/14/2010	2:08:40 PM	PHl3 MFC set to  0.000000
6/14/2010	2:08:40 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:08:40 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:08:40 PM	Tube furnace set to 0
6/14/2010	2:08:40 PM	Run finished at 2:08 PM
6/14/2010	2:13:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	2:13:15 PM	Recipe started at 2:13 PM
6/14/2010	2:13:15 PM	Helium valve closed
6/14/2010	2:13:15 PM	H2 valve closed
6/14/2010	2:13:15 PM	BCl3 valve closed
6/14/2010	2:13:15 PM	PH3 valve closed
6/14/2010	2:13:15 PM	SiCl4 pre valve closed
6/14/2010	2:13:15 PM	SiCl4 post valve closed
6/14/2010	2:13:15 PM	Main Vac valve closed
6/14/2010	2:13:15 PM	Bubbler valve closed
6/14/2010	2:13:15 PM	Bypass valve opened
6/14/2010	2:13:15 PM	Helium MFC set to  0.000000
6/14/2010	2:13:15 PM	H2 MFC set to  0.000000
6/14/2010	2:13:15 PM	BCl3 MFC set to  0.000000
6/14/2010	2:13:15 PM	PHl3 MFC set to  0.000000
6/14/2010	2:13:15 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:13:15 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:13:15 PM	Tube furnace set to 0
6/14/2010	2:14:02 PM	Helium valve closed
6/14/2010	2:14:02 PM	H2 valve closed
6/14/2010	2:14:02 PM	BCl3 valve closed
6/14/2010	2:14:02 PM	PH3 valve closed
6/14/2010	2:14:02 PM	SiCl4 pre valve closed
6/14/2010	2:14:02 PM	SiCl4 post valve closed
6/14/2010	2:14:02 PM	Bubbler valve closed
6/14/2010	2:14:02 PM	Main Vac valve opened
6/14/2010	2:14:02 PM	Bypass valve opened
6/14/2010	2:14:02 PM	Helium MFC set to  0.000000
6/14/2010	2:14:02 PM	H2 MFC set to  0.000000
6/14/2010	2:14:02 PM	BCl3 MFC set to  0.000000
6/14/2010	2:14:02 PM	PHl3 MFC set to  0.000000
6/14/2010	2:14:02 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:14:02 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:14:02 PM	Tube furnace set to 0
6/14/2010	2:14:03 PM	Run finished at 2:14 PM
6/14/2010	2:14:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	2:24:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/14/2010	2:24:56 PM	Recipe started at 2:24 PM
6/14/2010	2:24:56 PM	H2 valve closed
6/14/2010	2:24:56 PM	BCl3 valve closed
6/14/2010	2:24:56 PM	PH3 valve closed
6/14/2010	2:24:56 PM	SiCl4 pre valve closed
6/14/2010	2:24:56 PM	SiCl4 post valve closed
6/14/2010	2:24:56 PM	Main Vac valve closed
6/14/2010	2:24:56 PM	Bypass valve closed
6/14/2010	2:24:56 PM	Bubbler valve closed
6/14/2010	2:24:56 PM	Helium valve opened
6/14/2010	2:24:56 PM	Helium MFC set to  500.000000
6/14/2010	2:24:56 PM	H2 MFC set to  0.000000
6/14/2010	2:24:56 PM	BCl3 MFC set to  0.000000
6/14/2010	2:24:56 PM	PHl3 MFC set to  0.000000
6/14/2010	2:24:56 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:24:56 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:24:57 PM	Tube furnace set to 0
6/14/2010	2:26:14 PM	Helium valve closed
6/14/2010	2:26:14 PM	H2 valve closed
6/14/2010	2:26:14 PM	BCl3 valve closed
6/14/2010	2:26:14 PM	PH3 valve closed
6/14/2010	2:26:14 PM	SiCl4 pre valve closed
6/14/2010	2:26:14 PM	SiCl4 post valve closed
6/14/2010	2:26:14 PM	Main Vac valve closed
6/14/2010	2:26:14 PM	Bypass valve closed
6/14/2010	2:26:14 PM	Bubbler valve closed
6/14/2010	2:26:14 PM	Helium MFC set to  0.000000
6/14/2010	2:26:14 PM	H2 MFC set to  0.000000
6/14/2010	2:26:14 PM	BCl3 MFC set to  0.000000
6/14/2010	2:26:14 PM	PHl3 MFC set to  0.000000
6/14/2010	2:26:14 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:26:14 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:26:14 PM	Tube furnace set to 0
6/14/2010	2:26:29 PM	Helium valve closed
6/14/2010	2:26:29 PM	H2 valve closed
6/14/2010	2:26:29 PM	BCl3 valve closed
6/14/2010	2:26:29 PM	PH3 valve closed
6/14/2010	2:26:29 PM	SiCl4 pre valve closed
6/14/2010	2:26:29 PM	SiCl4 post valve closed
6/14/2010	2:26:29 PM	Main Vac valve closed
6/14/2010	2:26:29 PM	Bubbler valve closed
6/14/2010	2:26:29 PM	Bypass valve opened
6/14/2010	2:26:29 PM	Helium MFC set to  0.000000
6/14/2010	2:26:29 PM	H2 MFC set to  0.000000
6/14/2010	2:26:29 PM	BCl3 MFC set to  0.000000
6/14/2010	2:26:29 PM	PHl3 MFC set to  0.000000
6/14/2010	2:26:29 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:26:29 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:26:29 PM	Tube furnace set to 0
6/14/2010	2:27:01 PM	Helium valve closed
6/14/2010	2:27:01 PM	H2 valve closed
6/14/2010	2:27:01 PM	BCl3 valve closed
6/14/2010	2:27:01 PM	PH3 valve closed
6/14/2010	2:27:01 PM	SiCl4 pre valve closed
6/14/2010	2:27:01 PM	SiCl4 post valve closed
6/14/2010	2:27:01 PM	Bubbler valve closed
6/14/2010	2:27:01 PM	Main Vac valve opened
6/14/2010	2:27:01 PM	Bypass valve opened
6/14/2010	2:27:01 PM	Helium MFC set to  0.000000
6/14/2010	2:27:01 PM	H2 MFC set to  0.000000
6/14/2010	2:27:01 PM	BCl3 MFC set to  0.000000
6/14/2010	2:27:01 PM	PHl3 MFC set to  0.000000
6/14/2010	2:27:01 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:27:01 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:27:01 PM	Tube furnace set to 0
6/14/2010	2:32:01 PM	H2 valve closed
6/14/2010	2:32:01 PM	BCl3 valve closed
6/14/2010	2:32:01 PM	PH3 valve closed
6/14/2010	2:32:01 PM	SiCl4 pre valve closed
6/14/2010	2:32:01 PM	SiCl4 post valve closed
6/14/2010	2:32:01 PM	Main Vac valve closed
6/14/2010	2:32:01 PM	Bypass valve closed
6/14/2010	2:32:01 PM	Bubbler valve closed
6/14/2010	2:32:01 PM	Helium valve opened
6/14/2010	2:32:01 PM	Helium MFC set to  500.000000
6/14/2010	2:32:01 PM	H2 MFC set to  0.000000
6/14/2010	2:32:01 PM	BCl3 MFC set to  0.000000
6/14/2010	2:32:01 PM	PHl3 MFC set to  0.000000
6/14/2010	2:32:01 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:32:01 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:32:02 PM	Tube furnace set to 0
6/14/2010	2:33:19 PM	Helium valve closed
6/14/2010	2:33:19 PM	H2 valve closed
6/14/2010	2:33:19 PM	BCl3 valve closed
6/14/2010	2:33:19 PM	PH3 valve closed
6/14/2010	2:33:19 PM	SiCl4 pre valve closed
6/14/2010	2:33:19 PM	SiCl4 post valve closed
6/14/2010	2:33:19 PM	Main Vac valve closed
6/14/2010	2:33:19 PM	Bypass valve closed
6/14/2010	2:33:19 PM	Bubbler valve closed
6/14/2010	2:33:19 PM	Helium MFC set to  0.000000
6/14/2010	2:33:19 PM	H2 MFC set to  0.000000
6/14/2010	2:33:19 PM	BCl3 MFC set to  0.000000
6/14/2010	2:33:19 PM	PHl3 MFC set to  0.000000
6/14/2010	2:33:19 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:33:19 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:33:19 PM	Tube furnace set to 0
6/14/2010	2:33:34 PM	Helium valve closed
6/14/2010	2:33:34 PM	H2 valve closed
6/14/2010	2:33:34 PM	BCl3 valve closed
6/14/2010	2:33:34 PM	PH3 valve closed
6/14/2010	2:33:34 PM	SiCl4 pre valve closed
6/14/2010	2:33:34 PM	SiCl4 post valve closed
6/14/2010	2:33:34 PM	Main Vac valve closed
6/14/2010	2:33:34 PM	Bubbler valve closed
6/14/2010	2:33:34 PM	Bypass valve opened
6/14/2010	2:33:34 PM	Helium MFC set to  0.000000
6/14/2010	2:33:34 PM	H2 MFC set to  0.000000
6/14/2010	2:33:34 PM	BCl3 MFC set to  0.000000
6/14/2010	2:33:34 PM	PHl3 MFC set to  0.000000
6/14/2010	2:33:34 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:33:34 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:33:34 PM	Tube furnace set to 0
6/14/2010	2:34:06 PM	Helium valve closed
6/14/2010	2:34:06 PM	H2 valve closed
6/14/2010	2:34:06 PM	BCl3 valve closed
6/14/2010	2:34:06 PM	PH3 valve closed
6/14/2010	2:34:06 PM	SiCl4 pre valve closed
6/14/2010	2:34:06 PM	SiCl4 post valve closed
6/14/2010	2:34:06 PM	Bubbler valve closed
6/14/2010	2:34:06 PM	Main Vac valve opened
6/14/2010	2:34:06 PM	Bypass valve opened
6/14/2010	2:34:06 PM	Helium MFC set to  0.000000
6/14/2010	2:34:06 PM	H2 MFC set to  0.000000
6/14/2010	2:34:06 PM	BCl3 MFC set to  0.000000
6/14/2010	2:34:06 PM	PHl3 MFC set to  0.000000
6/14/2010	2:34:06 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:34:06 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:34:06 PM	Tube furnace set to 0
6/14/2010	2:39:06 PM	H2 valve closed
6/14/2010	2:39:06 PM	BCl3 valve closed
6/14/2010	2:39:06 PM	PH3 valve closed
6/14/2010	2:39:06 PM	SiCl4 pre valve closed
6/14/2010	2:39:06 PM	SiCl4 post valve closed
6/14/2010	2:39:06 PM	Main Vac valve closed
6/14/2010	2:39:06 PM	Bypass valve closed
6/14/2010	2:39:06 PM	Bubbler valve closed
6/14/2010	2:39:06 PM	Helium valve opened
6/14/2010	2:39:06 PM	Helium MFC set to  500.000000
6/14/2010	2:39:06 PM	H2 MFC set to  0.000000
6/14/2010	2:39:06 PM	BCl3 MFC set to  0.000000
6/14/2010	2:39:06 PM	PHl3 MFC set to  0.000000
6/14/2010	2:39:06 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:39:06 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:39:07 PM	Tube furnace set to 0
6/14/2010	2:40:24 PM	Helium valve closed
6/14/2010	2:40:24 PM	H2 valve closed
6/14/2010	2:40:24 PM	BCl3 valve closed
6/14/2010	2:40:24 PM	PH3 valve closed
6/14/2010	2:40:24 PM	SiCl4 pre valve closed
6/14/2010	2:40:24 PM	SiCl4 post valve closed
6/14/2010	2:40:24 PM	Main Vac valve closed
6/14/2010	2:40:24 PM	Bypass valve closed
6/14/2010	2:40:24 PM	Bubbler valve closed
6/14/2010	2:40:24 PM	Helium MFC set to  0.000000
6/14/2010	2:40:24 PM	H2 MFC set to  0.000000
6/14/2010	2:40:24 PM	BCl3 MFC set to  0.000000
6/14/2010	2:40:24 PM	PHl3 MFC set to  0.000000
6/14/2010	2:40:24 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:40:24 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:40:24 PM	Tube furnace set to 0
6/14/2010	2:40:39 PM	Helium valve closed
6/14/2010	2:40:39 PM	H2 valve closed
6/14/2010	2:40:39 PM	BCl3 valve closed
6/14/2010	2:40:39 PM	PH3 valve closed
6/14/2010	2:40:39 PM	SiCl4 pre valve closed
6/14/2010	2:40:39 PM	SiCl4 post valve closed
6/14/2010	2:40:39 PM	Main Vac valve closed
6/14/2010	2:40:39 PM	Bubbler valve closed
6/14/2010	2:40:39 PM	Bypass valve opened
6/14/2010	2:40:39 PM	Helium MFC set to  0.000000
6/14/2010	2:40:39 PM	H2 MFC set to  0.000000
6/14/2010	2:40:39 PM	BCl3 MFC set to  0.000000
6/14/2010	2:40:39 PM	PHl3 MFC set to  0.000000
6/14/2010	2:40:39 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:40:39 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:40:39 PM	Tube furnace set to 0
6/14/2010	2:41:11 PM	Helium valve closed
6/14/2010	2:41:11 PM	H2 valve closed
6/14/2010	2:41:11 PM	BCl3 valve closed
6/14/2010	2:41:11 PM	PH3 valve closed
6/14/2010	2:41:11 PM	SiCl4 pre valve closed
6/14/2010	2:41:11 PM	SiCl4 post valve closed
6/14/2010	2:41:11 PM	Bubbler valve closed
6/14/2010	2:41:11 PM	Main Vac valve opened
6/14/2010	2:41:11 PM	Bypass valve opened
6/14/2010	2:41:11 PM	Helium MFC set to  0.000000
6/14/2010	2:41:11 PM	H2 MFC set to  0.000000
6/14/2010	2:41:11 PM	BCl3 MFC set to  0.000000
6/14/2010	2:41:11 PM	PHl3 MFC set to  0.000000
6/14/2010	2:41:11 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:41:11 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:41:11 PM	Tube furnace set to 0
6/14/2010	2:46:11 PM	Helium valve closed
6/14/2010	2:46:11 PM	H2 valve closed
6/14/2010	2:46:11 PM	BCl3 valve closed
6/14/2010	2:46:11 PM	PH3 valve closed
6/14/2010	2:46:11 PM	SiCl4 pre valve closed
6/14/2010	2:46:11 PM	SiCl4 post valve closed
6/14/2010	2:46:11 PM	Bubbler valve closed
6/14/2010	2:46:11 PM	Main Vac valve opened
6/14/2010	2:46:11 PM	Bypass valve opened
6/14/2010	2:46:11 PM	Helium MFC set to  0.000000
6/14/2010	2:46:11 PM	H2 MFC set to  0.000000
6/14/2010	2:46:11 PM	BCl3 MFC set to  0.000000
6/14/2010	2:46:11 PM	PHl3 MFC set to  0.000000
6/14/2010	2:46:11 PM	SiCl4 MFC set to  0.000000
6/14/2010	2:46:11 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	2:46:12 PM	Tube furnace set to 0
6/14/2010	2:46:13 PM	Run finished at 2:46 PM
6/14/2010	2:46:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/14/2010	3:50:01 PM	Main Vac valve closed
6/14/2010	3:50:03 PM	Bypass valve closed
6/14/2010	3:51:28 PM	Recipe started at 3:51 PM
6/14/2010	3:51:28 PM	Helium valve closed
6/14/2010	3:51:28 PM	BCl3 valve closed
6/14/2010	3:51:28 PM	PH3 valve closed
6/14/2010	3:51:28 PM	SiCl4 pre valve closed
6/14/2010	3:51:28 PM	SiCl4 post valve closed
6/14/2010	3:51:28 PM	Main Vac valve closed
6/14/2010	3:51:28 PM	Bypass valve closed
6/14/2010	3:51:28 PM	Bubbler valve closed
6/14/2010	3:51:28 PM	H2 valve opened
6/14/2010	3:51:28 PM	Helium MFC set to  0.000000
6/14/2010	3:51:28 PM	H2 MFC set to  500.000000
6/14/2010	3:51:28 PM	BCl3 MFC set to  0.000000
6/14/2010	3:51:28 PM	PHl3 MFC set to  0.000000
6/14/2010	3:51:28 PM	SiCl4 MFC set to  0.000000
6/14/2010	3:51:28 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	3:51:28 PM	Tube furnace set to 0
6/14/2010	3:52:47 PM	Helium valve closed
6/14/2010	3:52:47 PM	BCl3 valve closed
6/14/2010	3:52:47 PM	PH3 valve closed
6/14/2010	3:52:47 PM	SiCl4 pre valve closed
6/14/2010	3:52:47 PM	SiCl4 post valve closed
6/14/2010	3:52:47 PM	Main Vac valve closed
6/14/2010	3:52:47 PM	Bypass valve closed
6/14/2010	3:52:47 PM	H2 valve opened
6/14/2010	3:52:47 PM	Bubbler valve opened
6/14/2010	3:52:47 PM	Helium MFC set to  0.000000
6/14/2010	3:52:47 PM	H2 MFC set to  500.000000
6/14/2010	3:52:47 PM	BCl3 MFC set to  0.000000
6/14/2010	3:52:47 PM	PHl3 MFC set to  0.000000
6/14/2010	3:52:47 PM	SiCl4 MFC set to  0.000000
6/14/2010	3:52:47 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	3:52:47 PM	Tube furnace set to 1000
6/14/2010	4:12:47 PM	Helium valve closed
6/14/2010	4:12:47 PM	BCl3 valve closed
6/14/2010	4:12:47 PM	Main Vac valve closed
6/14/2010	4:12:47 PM	Bypass valve closed
6/14/2010	4:12:47 PM	H2 valve opened
6/14/2010	4:12:47 PM	PH3 valve opened
6/14/2010	4:12:47 PM	SiCl4 pre valve opened
6/14/2010	4:12:47 PM	SiCl4 post valve opened
6/14/2010	4:12:47 PM	Bubbler valve opened
6/14/2010	4:12:47 PM	Helium MFC set to  0.000000
6/14/2010	4:12:47 PM	H2 MFC set to  500.000000
6/14/2010	4:12:47 PM	BCl3 MFC set to  0.000000
6/14/2010	4:12:47 PM	PHl3 MFC set to  1.000000
6/14/2010	4:12:47 PM	SiCl4 MFC set to  50.000000
6/14/2010	4:12:47 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	4:12:47 PM	Tube furnace set to 1000
6/14/2010	4:32:47 PM	H2 valve closed
6/14/2010	4:32:47 PM	BCl3 valve closed
6/14/2010	4:32:47 PM	PH3 valve closed
6/14/2010	4:32:47 PM	SiCl4 pre valve closed
6/14/2010	4:32:47 PM	SiCl4 post valve closed
6/14/2010	4:32:47 PM	Main Vac valve closed
6/14/2010	4:32:47 PM	Bypass valve closed
6/14/2010	4:32:47 PM	Helium valve opened
6/14/2010	4:32:47 PM	Bubbler valve opened
6/14/2010	4:32:47 PM	Helium MFC set to  500.000000
6/14/2010	4:32:47 PM	H2 MFC set to  0.000000
6/14/2010	4:32:47 PM	BCl3 MFC set to  0.000000
6/14/2010	4:32:47 PM	PHl3 MFC set to  0.000000
6/14/2010	4:32:47 PM	SiCl4 MFC set to  0.000000
6/14/2010	4:32:47 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	4:32:47 PM	Tube furnace set to 0
6/14/2010	4:52:47 PM	Helium valve closed
6/14/2010	4:52:47 PM	H2 valve closed
6/14/2010	4:52:47 PM	BCl3 valve closed
6/14/2010	4:52:47 PM	PH3 valve closed
6/14/2010	4:52:47 PM	SiCl4 pre valve closed
6/14/2010	4:52:47 PM	SiCl4 post valve closed
6/14/2010	4:52:47 PM	Main Vac valve closed
6/14/2010	4:52:47 PM	Bypass valve closed
6/14/2010	4:52:47 PM	Bubbler valve closed
6/14/2010	4:52:47 PM	Helium MFC set to  0.000000
6/14/2010	4:52:47 PM	H2 MFC set to  0.000000
6/14/2010	4:52:47 PM	BCl3 MFC set to  0.000000
6/14/2010	4:52:47 PM	PHl3 MFC set to  0.000000
6/14/2010	4:52:47 PM	SiCl4 MFC set to  0.000000
6/14/2010	4:52:47 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	4:52:47 PM	Tube furnace set to 0
6/14/2010	4:52:48 PM	Run finished at 4:52 PM
6/14/2010	4:55:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	4:55:16 PM	Recipe started at 4:55 PM
6/14/2010	4:55:16 PM	Helium valve closed
6/14/2010	4:55:16 PM	H2 valve closed
6/14/2010	4:55:16 PM	BCl3 valve closed
6/14/2010	4:55:16 PM	PH3 valve closed
6/14/2010	4:55:16 PM	SiCl4 pre valve closed
6/14/2010	4:55:16 PM	SiCl4 post valve closed
6/14/2010	4:55:16 PM	Main Vac valve closed
6/14/2010	4:55:16 PM	Bubbler valve closed
6/14/2010	4:55:16 PM	Bypass valve opened
6/14/2010	4:55:16 PM	Helium MFC set to  0.000000
6/14/2010	4:55:16 PM	H2 MFC set to  0.000000
6/14/2010	4:55:16 PM	BCl3 MFC set to  0.000000
6/14/2010	4:55:16 PM	PHl3 MFC set to  0.000000
6/14/2010	4:55:16 PM	SiCl4 MFC set to  0.000000
6/14/2010	4:55:16 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	4:55:16 PM	Tube furnace set to 0
6/14/2010	4:56:02 PM	Helium valve closed
6/14/2010	4:56:02 PM	H2 valve closed
6/14/2010	4:56:02 PM	BCl3 valve closed
6/14/2010	4:56:02 PM	PH3 valve closed
6/14/2010	4:56:02 PM	SiCl4 pre valve closed
6/14/2010	4:56:02 PM	SiCl4 post valve closed
6/14/2010	4:56:02 PM	Bubbler valve closed
6/14/2010	4:56:02 PM	Main Vac valve opened
6/14/2010	4:56:02 PM	Bypass valve opened
6/14/2010	4:56:02 PM	Helium MFC set to  0.000000
6/14/2010	4:56:02 PM	H2 MFC set to  0.000000
6/14/2010	4:56:02 PM	BCl3 MFC set to  0.000000
6/14/2010	4:56:02 PM	PHl3 MFC set to  0.000000
6/14/2010	4:56:02 PM	SiCl4 MFC set to  0.000000
6/14/2010	4:56:02 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	4:56:02 PM	Tube furnace set to 0
6/14/2010	4:56:02 PM	Run finished at 4:56 PM
6/14/2010	4:56:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	6:31:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/14/2010	6:31:10 PM	Recipe started at 6:31 PM
6/14/2010	6:31:10 PM	H2 valve closed
6/14/2010	6:31:10 PM	BCl3 valve closed
6/14/2010	6:31:10 PM	PH3 valve closed
6/14/2010	6:31:10 PM	SiCl4 pre valve closed
6/14/2010	6:31:10 PM	SiCl4 post valve closed
6/14/2010	6:31:10 PM	Main Vac valve closed
6/14/2010	6:31:10 PM	Bypass valve closed
6/14/2010	6:31:10 PM	Bubbler valve closed
6/14/2010	6:31:10 PM	Helium valve opened
6/14/2010	6:31:10 PM	Helium MFC set to  500.000000
6/14/2010	6:31:10 PM	H2 MFC set to  0.000000
6/14/2010	6:31:10 PM	BCl3 MFC set to  0.000000
6/14/2010	6:31:10 PM	PHl3 MFC set to  0.000000
6/14/2010	6:31:10 PM	SiCl4 MFC set to  0.000000
6/14/2010	6:31:10 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	6:31:10 PM	Tube furnace set to 0
6/14/2010	6:32:29 PM	Helium valve closed
6/14/2010	6:32:29 PM	H2 valve closed
6/14/2010	6:32:29 PM	BCl3 valve closed
6/14/2010	6:32:29 PM	PH3 valve closed
6/14/2010	6:32:29 PM	SiCl4 pre valve closed
6/14/2010	6:32:29 PM	SiCl4 post valve closed
6/14/2010	6:32:29 PM	Main Vac valve closed
6/14/2010	6:32:29 PM	Bypass valve closed
6/14/2010	6:32:29 PM	Bubbler valve closed
6/14/2010	6:32:29 PM	Helium MFC set to  0.000000
6/14/2010	6:32:29 PM	H2 MFC set to  0.000000
6/14/2010	6:32:29 PM	BCl3 MFC set to  0.000000
6/14/2010	6:32:29 PM	PHl3 MFC set to  0.000000
6/14/2010	6:32:29 PM	SiCl4 MFC set to  0.000000
6/14/2010	6:32:29 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	6:32:30 PM	Tube furnace set to 0
6/14/2010	6:32:30 PM	Run finished at 6:32 PM
6/14/2010	6:32:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/14/2010	6:38:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	6:38:23 PM	Recipe started at 6:38 PM
6/14/2010	6:38:23 PM	Helium valve closed
6/14/2010	6:38:23 PM	H2 valve closed
6/14/2010	6:38:23 PM	BCl3 valve closed
6/14/2010	6:38:23 PM	PH3 valve closed
6/14/2010	6:38:23 PM	SiCl4 pre valve closed
6/14/2010	6:38:23 PM	SiCl4 post valve closed
6/14/2010	6:38:23 PM	Main Vac valve closed
6/14/2010	6:38:23 PM	Bubbler valve closed
6/14/2010	6:38:23 PM	Bypass valve opened
6/14/2010	6:38:23 PM	Helium MFC set to  0.000000
6/14/2010	6:38:23 PM	H2 MFC set to  0.000000
6/14/2010	6:38:23 PM	BCl3 MFC set to  0.000000
6/14/2010	6:38:23 PM	PHl3 MFC set to  0.000000
6/14/2010	6:38:23 PM	SiCl4 MFC set to  0.000000
6/14/2010	6:38:23 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	6:38:24 PM	Tube furnace set to 0
6/14/2010	6:39:12 PM	Helium valve closed
6/14/2010	6:39:12 PM	H2 valve closed
6/14/2010	6:39:12 PM	BCl3 valve closed
6/14/2010	6:39:12 PM	PH3 valve closed
6/14/2010	6:39:12 PM	SiCl4 pre valve closed
6/14/2010	6:39:12 PM	SiCl4 post valve closed
6/14/2010	6:39:12 PM	Bubbler valve closed
6/14/2010	6:39:12 PM	Main Vac valve opened
6/14/2010	6:39:12 PM	Bypass valve opened
6/14/2010	6:39:12 PM	Helium MFC set to  0.000000
6/14/2010	6:39:12 PM	H2 MFC set to  0.000000
6/14/2010	6:39:12 PM	BCl3 MFC set to  0.000000
6/14/2010	6:39:12 PM	PHl3 MFC set to  0.000000
6/14/2010	6:39:12 PM	SiCl4 MFC set to  0.000000
6/14/2010	6:39:12 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	6:39:12 PM	Tube furnace set to 0
6/14/2010	6:39:12 PM	Run finished at 6:39 PM
6/14/2010	6:39:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	6:44:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/14/2010	6:44:50 PM	Recipe started at 6:44 PM
6/14/2010	6:44:50 PM	H2 valve closed
6/14/2010	6:44:50 PM	BCl3 valve closed
6/14/2010	6:44:50 PM	PH3 valve closed
6/14/2010	6:44:50 PM	SiCl4 pre valve closed
6/14/2010	6:44:50 PM	SiCl4 post valve closed
6/14/2010	6:44:50 PM	Main Vac valve closed
6/14/2010	6:44:50 PM	Bypass valve closed
6/14/2010	6:44:50 PM	Bubbler valve closed
6/14/2010	6:44:50 PM	Helium valve opened
6/14/2010	6:44:50 PM	Helium MFC set to  500.000000
6/14/2010	6:44:50 PM	H2 MFC set to  0.000000
6/14/2010	6:44:50 PM	BCl3 MFC set to  0.000000
6/14/2010	6:44:50 PM	PHl3 MFC set to  0.000000
6/14/2010	6:44:50 PM	SiCl4 MFC set to  0.000000
6/14/2010	6:44:50 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	6:44:50 PM	Tube furnace set to 0
6/14/2010	6:46:10 PM	Helium valve closed
6/14/2010	6:46:10 PM	H2 valve closed
6/14/2010	6:46:10 PM	BCl3 valve closed
6/14/2010	6:46:10 PM	PH3 valve closed
6/14/2010	6:46:10 PM	SiCl4 pre valve closed
6/14/2010	6:46:10 PM	SiCl4 post valve closed
6/14/2010	6:46:10 PM	Main Vac valve closed
6/14/2010	6:46:10 PM	Bypass valve closed
6/14/2010	6:46:10 PM	Bubbler valve closed
6/14/2010	6:46:10 PM	Helium MFC set to  0.000000
6/14/2010	6:46:10 PM	H2 MFC set to  0.000000
6/14/2010	6:46:10 PM	BCl3 MFC set to  0.000000
6/14/2010	6:46:10 PM	PHl3 MFC set to  0.000000
6/14/2010	6:46:10 PM	SiCl4 MFC set to  0.000000
6/14/2010	6:46:10 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	6:46:11 PM	Tube furnace set to 0
6/14/2010	6:46:11 PM	Run finished at 6:46 PM
6/14/2010	6:46:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/14/2010	6:48:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	6:48:19 PM	Recipe started at 6:48 PM
6/14/2010	6:48:19 PM	Helium valve closed
6/14/2010	6:48:19 PM	H2 valve closed
6/14/2010	6:48:19 PM	BCl3 valve closed
6/14/2010	6:48:19 PM	PH3 valve closed
6/14/2010	6:48:19 PM	SiCl4 pre valve closed
6/14/2010	6:48:19 PM	SiCl4 post valve closed
6/14/2010	6:48:19 PM	Main Vac valve closed
6/14/2010	6:48:19 PM	Bubbler valve closed
6/14/2010	6:48:19 PM	Bypass valve opened
6/14/2010	6:48:19 PM	Helium MFC set to  0.000000
6/14/2010	6:48:19 PM	H2 MFC set to  0.000000
6/14/2010	6:48:19 PM	BCl3 MFC set to  0.000000
6/14/2010	6:48:19 PM	PHl3 MFC set to  0.000000
6/14/2010	6:48:19 PM	SiCl4 MFC set to  0.000000
6/14/2010	6:48:19 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	6:48:19 PM	Tube furnace set to 0
6/14/2010	6:49:06 PM	Helium valve closed
6/14/2010	6:49:06 PM	H2 valve closed
6/14/2010	6:49:06 PM	BCl3 valve closed
6/14/2010	6:49:06 PM	PH3 valve closed
6/14/2010	6:49:06 PM	SiCl4 pre valve closed
6/14/2010	6:49:06 PM	SiCl4 post valve closed
6/14/2010	6:49:06 PM	Bubbler valve closed
6/14/2010	6:49:06 PM	Main Vac valve opened
6/14/2010	6:49:06 PM	Bypass valve opened
6/14/2010	6:49:06 PM	Helium MFC set to  0.000000
6/14/2010	6:49:06 PM	H2 MFC set to  0.000000
6/14/2010	6:49:06 PM	BCl3 MFC set to  0.000000
6/14/2010	6:49:06 PM	PHl3 MFC set to  0.000000
6/14/2010	6:49:06 PM	SiCl4 MFC set to  0.000000
6/14/2010	6:49:06 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	6:49:06 PM	Tube furnace set to 0
6/14/2010	6:49:06 PM	Run finished at 6:49 PM
6/14/2010	6:49:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	6:49:13 PM	Helium MFC set to  75.000000
6/14/2010	6:49:14 PM	Helium valve opened
6/14/2010	6:57:40 PM	Helium valve closed
6/14/2010	7:30:22 PM	Helium valve opened
6/14/2010	7:39:41 PM	Helium valve closed
6/14/2010	7:48:11 PM	Helium valve opened
6/14/2010	8:05:01 PM	Helium valve closed
6/14/2010	8:07:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/14/2010	8:07:29 PM	Recipe started at 8:07 PM
6/14/2010	8:07:29 PM	Helium valve closed
6/14/2010	8:07:29 PM	H2 valve closed
6/14/2010	8:07:29 PM	BCl3 valve closed
6/14/2010	8:07:29 PM	PH3 valve closed
6/14/2010	8:07:29 PM	SiCl4 pre valve closed
6/14/2010	8:07:29 PM	SiCl4 post valve closed
6/14/2010	8:07:29 PM	Main Vac valve closed
6/14/2010	8:07:29 PM	Bypass valve closed
6/14/2010	8:07:29 PM	Bubbler valve closed
6/14/2010	8:07:29 PM	Helium MFC set to  0.000000
6/14/2010	8:07:29 PM	H2 MFC set to  0.000000
6/14/2010	8:07:29 PM	BCl3 MFC set to  0.000000
6/14/2010	8:07:29 PM	PHl3 MFC set to  0.000000
6/14/2010	8:07:29 PM	SiCl4 MFC set to  0.000000
6/14/2010	8:07:29 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	8:07:29 PM	Tube furnace set to 0
6/14/2010	8:07:30 PM	Run finished at 8:07 PM
6/14/2010	8:07:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
6/14/2010	8:07:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	8:07:42 PM	Recipe started at 8:07 PM
6/14/2010	8:07:42 PM	Helium valve closed
6/14/2010	8:07:42 PM	H2 valve closed
6/14/2010	8:07:42 PM	BCl3 valve closed
6/14/2010	8:07:42 PM	PH3 valve closed
6/14/2010	8:07:42 PM	SiCl4 pre valve closed
6/14/2010	8:07:42 PM	SiCl4 post valve closed
6/14/2010	8:07:42 PM	Main Vac valve closed
6/14/2010	8:07:42 PM	Bubbler valve closed
6/14/2010	8:07:42 PM	Bypass valve opened
6/14/2010	8:07:42 PM	Helium MFC set to  0.000000
6/14/2010	8:07:42 PM	H2 MFC set to  0.000000
6/14/2010	8:07:42 PM	BCl3 MFC set to  0.000000
6/14/2010	8:07:42 PM	PHl3 MFC set to  0.000000
6/14/2010	8:07:42 PM	SiCl4 MFC set to  0.000000
6/14/2010	8:07:42 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	8:07:42 PM	Tube furnace set to 0
6/14/2010	8:07:42 PM	Helium valve closed
6/14/2010	8:07:42 PM	H2 valve closed
6/14/2010	8:07:42 PM	BCl3 valve closed
6/14/2010	8:07:42 PM	PH3 valve closed
6/14/2010	8:07:42 PM	SiCl4 pre valve closed
6/14/2010	8:07:42 PM	SiCl4 post valve closed
6/14/2010	8:07:42 PM	Bubbler valve closed
6/14/2010	8:07:42 PM	Main Vac valve opened
6/14/2010	8:07:42 PM	Bypass valve opened
6/14/2010	8:07:42 PM	Helium MFC set to  0.000000
6/14/2010	8:07:42 PM	H2 MFC set to  0.000000
6/14/2010	8:07:42 PM	BCl3 MFC set to  0.000000
6/14/2010	8:07:42 PM	PHl3 MFC set to  0.000000
6/14/2010	8:07:42 PM	SiCl4 MFC set to  0.000000
6/14/2010	8:07:42 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	8:07:42 PM	Tube furnace set to 0
6/14/2010	8:07:43 PM	Run finished at 8:07 PM
6/14/2010	8:07:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	8:07:55 PM	Helium MFC set to  75.000000
6/14/2010	8:07:56 PM	Helium valve opened
6/14/2010	8:08:07 PM	Helium valve closed
6/14/2010	9:36:42 PM	Recipe started at 9:36 PM
6/14/2010	9:36:42 PM	Helium valve closed
6/14/2010	9:36:42 PM	BCl3 valve closed
6/14/2010	9:36:42 PM	PH3 valve closed
6/14/2010	9:36:42 PM	SiCl4 pre valve closed
6/14/2010	9:36:42 PM	SiCl4 post valve closed
6/14/2010	9:36:42 PM	Main Vac valve closed
6/14/2010	9:36:42 PM	Bypass valve closed
6/14/2010	9:36:42 PM	Bubbler valve closed
6/14/2010	9:36:42 PM	H2 valve opened
6/14/2010	9:36:42 PM	Helium MFC set to  0.000000
6/14/2010	9:36:42 PM	H2 MFC set to  500.000000
6/14/2010	9:36:42 PM	BCl3 MFC set to  0.000000
6/14/2010	9:36:42 PM	PHl3 MFC set to  0.000000
6/14/2010	9:36:42 PM	SiCl4 MFC set to  0.000000
6/14/2010	9:36:42 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	9:36:42 PM	Tube furnace set to 0
6/14/2010	9:38:05 PM	Helium valve closed
6/14/2010	9:38:05 PM	BCl3 valve closed
6/14/2010	9:38:05 PM	PH3 valve closed
6/14/2010	9:38:05 PM	SiCl4 pre valve closed
6/14/2010	9:38:05 PM	SiCl4 post valve closed
6/14/2010	9:38:05 PM	Main Vac valve closed
6/14/2010	9:38:05 PM	Bypass valve closed
6/14/2010	9:38:05 PM	H2 valve opened
6/14/2010	9:38:05 PM	Bubbler valve opened
6/14/2010	9:38:05 PM	Helium MFC set to  0.000000
6/14/2010	9:38:05 PM	H2 MFC set to  500.000000
6/14/2010	9:38:05 PM	BCl3 MFC set to  0.000000
6/14/2010	9:38:05 PM	PHl3 MFC set to  0.000000
6/14/2010	9:38:05 PM	SiCl4 MFC set to  0.000000
6/14/2010	9:38:05 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	9:38:05 PM	Tube furnace set to 1000
6/14/2010	9:39:38 PM	Run aborted at 9:39 PM
6/14/2010	9:39:38 PM	Helium valve closed
6/14/2010	9:39:38 PM	H2 valve closed
6/14/2010	9:39:38 PM	BCl3 valve closed
6/14/2010	9:39:38 PM	PH3 valve closed
6/14/2010	9:39:38 PM	SiCl4 pre valve closed
6/14/2010	9:39:38 PM	SiCl4 post valve closed
6/14/2010	9:39:38 PM	Bypass valve closed
6/14/2010	9:39:38 PM	Main Vac valve closed
6/14/2010	9:39:38 PM	Bubbler valve closed
6/14/2010	9:39:38 PM	Helium MFC set to  0.000000
6/14/2010	9:39:38 PM	H2 MFC set to  0.000000
6/14/2010	9:39:38 PM	BCl3 MFC set to  0.000000
6/14/2010	9:39:38 PM	PHl3 MFC set to  0.000000
6/14/2010	9:39:38 PM	SiCl4 MFC set to  0.000000
6/14/2010	9:39:38 PM	Tube furnace set to 0
6/14/2010	9:39:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	9:39:49 PM	Recipe started at 9:39 PM
6/14/2010	9:39:49 PM	Helium valve closed
6/14/2010	9:39:49 PM	H2 valve closed
6/14/2010	9:39:49 PM	BCl3 valve closed
6/14/2010	9:39:49 PM	PH3 valve closed
6/14/2010	9:39:49 PM	SiCl4 pre valve closed
6/14/2010	9:39:49 PM	SiCl4 post valve closed
6/14/2010	9:39:49 PM	Main Vac valve closed
6/14/2010	9:39:49 PM	Bubbler valve closed
6/14/2010	9:39:49 PM	Bypass valve opened
6/14/2010	9:39:49 PM	Helium MFC set to  0.000000
6/14/2010	9:39:49 PM	H2 MFC set to  0.000000
6/14/2010	9:39:49 PM	BCl3 MFC set to  0.000000
6/14/2010	9:39:49 PM	PHl3 MFC set to  0.000000
6/14/2010	9:39:49 PM	SiCl4 MFC set to  0.000000
6/14/2010	9:39:49 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	9:39:50 PM	Tube furnace set to 0
6/14/2010	9:40:10 PM	Helium valve closed
6/14/2010	9:40:10 PM	H2 valve closed
6/14/2010	9:40:10 PM	BCl3 valve closed
6/14/2010	9:40:10 PM	PH3 valve closed
6/14/2010	9:40:10 PM	SiCl4 pre valve closed
6/14/2010	9:40:10 PM	SiCl4 post valve closed
6/14/2010	9:40:10 PM	Bubbler valve closed
6/14/2010	9:40:10 PM	Main Vac valve opened
6/14/2010	9:40:10 PM	Bypass valve opened
6/14/2010	9:40:10 PM	Helium MFC set to  0.000000
6/14/2010	9:40:10 PM	H2 MFC set to  0.000000
6/14/2010	9:40:10 PM	BCl3 MFC set to  0.000000
6/14/2010	9:40:10 PM	PHl3 MFC set to  0.000000
6/14/2010	9:40:10 PM	SiCl4 MFC set to  0.000000
6/14/2010	9:40:10 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	9:40:10 PM	Tube furnace set to 0
6/14/2010	9:40:10 PM	Run finished at 9:40 PM
6/14/2010	9:40:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	9:42:41 PM	Recipe started at 9:42 PM
6/14/2010	9:42:41 PM	Helium valve closed
6/14/2010	9:42:41 PM	BCl3 valve closed
6/14/2010	9:42:41 PM	PH3 valve closed
6/14/2010	9:42:41 PM	SiCl4 pre valve closed
6/14/2010	9:42:41 PM	SiCl4 post valve closed
6/14/2010	9:42:41 PM	Main Vac valve closed
6/14/2010	9:42:41 PM	Bypass valve closed
6/14/2010	9:42:41 PM	Bubbler valve closed
6/14/2010	9:42:41 PM	H2 valve opened
6/14/2010	9:42:41 PM	Helium MFC set to  0.000000
6/14/2010	9:42:41 PM	H2 MFC set to  500.000000
6/14/2010	9:42:41 PM	BCl3 MFC set to  0.000000
6/14/2010	9:42:41 PM	PHl3 MFC set to  0.000000
6/14/2010	9:42:41 PM	SiCl4 MFC set to  0.000000
6/14/2010	9:42:41 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	9:42:42 PM	Tube furnace set to 0
6/14/2010	9:44:01 PM	Helium valve closed
6/14/2010	9:44:01 PM	BCl3 valve closed
6/14/2010	9:44:01 PM	PH3 valve closed
6/14/2010	9:44:01 PM	SiCl4 pre valve closed
6/14/2010	9:44:01 PM	SiCl4 post valve closed
6/14/2010	9:44:01 PM	Main Vac valve closed
6/14/2010	9:44:01 PM	Bypass valve closed
6/14/2010	9:44:01 PM	H2 valve opened
6/14/2010	9:44:01 PM	Bubbler valve opened
6/14/2010	9:44:01 PM	Helium MFC set to  0.000000
6/14/2010	9:44:01 PM	H2 MFC set to  500.000000
6/14/2010	9:44:01 PM	BCl3 MFC set to  0.000000
6/14/2010	9:44:01 PM	PHl3 MFC set to  0.000000
6/14/2010	9:44:01 PM	SiCl4 MFC set to  0.000000
6/14/2010	9:44:01 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	9:44:01 PM	Tube furnace set to 1000
6/14/2010	9:44:17 PM	Run aborted at 9:44 PM
6/14/2010	9:44:17 PM	Helium valve closed
6/14/2010	9:44:17 PM	H2 valve closed
6/14/2010	9:44:17 PM	BCl3 valve closed
6/14/2010	9:44:17 PM	PH3 valve closed
6/14/2010	9:44:17 PM	SiCl4 pre valve closed
6/14/2010	9:44:17 PM	SiCl4 post valve closed
6/14/2010	9:44:17 PM	Bypass valve closed
6/14/2010	9:44:17 PM	Main Vac valve closed
6/14/2010	9:44:17 PM	Bubbler valve closed
6/14/2010	9:44:17 PM	Helium MFC set to  0.000000
6/14/2010	9:44:17 PM	H2 MFC set to  0.000000
6/14/2010	9:44:17 PM	BCl3 MFC set to  0.000000
6/14/2010	9:44:17 PM	PHl3 MFC set to  0.000000
6/14/2010	9:44:17 PM	SiCl4 MFC set to  0.000000
6/14/2010	9:44:17 PM	Tube furnace set to 0
6/14/2010	9:44:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	9:44:20 PM	Recipe started at 9:44 PM
6/14/2010	9:44:20 PM	Helium valve closed
6/14/2010	9:44:20 PM	H2 valve closed
6/14/2010	9:44:20 PM	BCl3 valve closed
6/14/2010	9:44:20 PM	PH3 valve closed
6/14/2010	9:44:20 PM	SiCl4 pre valve closed
6/14/2010	9:44:20 PM	SiCl4 post valve closed
6/14/2010	9:44:20 PM	Main Vac valve closed
6/14/2010	9:44:20 PM	Bubbler valve closed
6/14/2010	9:44:20 PM	Bypass valve opened
6/14/2010	9:44:20 PM	Helium MFC set to  0.000000
6/14/2010	9:44:20 PM	H2 MFC set to  0.000000
6/14/2010	9:44:20 PM	BCl3 MFC set to  0.000000
6/14/2010	9:44:20 PM	PHl3 MFC set to  0.000000
6/14/2010	9:44:20 PM	SiCl4 MFC set to  0.000000
6/14/2010	9:44:20 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	9:44:20 PM	Tube furnace set to 0
6/14/2010	9:44:40 PM	Helium valve closed
6/14/2010	9:44:40 PM	H2 valve closed
6/14/2010	9:44:40 PM	BCl3 valve closed
6/14/2010	9:44:40 PM	PH3 valve closed
6/14/2010	9:44:40 PM	SiCl4 pre valve closed
6/14/2010	9:44:40 PM	SiCl4 post valve closed
6/14/2010	9:44:40 PM	Bubbler valve closed
6/14/2010	9:44:40 PM	Main Vac valve opened
6/14/2010	9:44:40 PM	Bypass valve opened
6/14/2010	9:44:40 PM	Helium MFC set to  0.000000
6/14/2010	9:44:40 PM	H2 MFC set to  0.000000
6/14/2010	9:44:40 PM	BCl3 MFC set to  0.000000
6/14/2010	9:44:40 PM	PHl3 MFC set to  0.000000
6/14/2010	9:44:40 PM	SiCl4 MFC set to  0.000000
6/14/2010	9:44:40 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	9:44:40 PM	Tube furnace set to 0
6/14/2010	9:44:40 PM	Run finished at 9:44 PM
6/14/2010	9:44:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	10:09:03 PM	Recipe started at 10:09 PM
6/14/2010	10:09:03 PM	Helium valve closed
6/14/2010	10:09:03 PM	BCl3 valve closed
6/14/2010	10:09:03 PM	PH3 valve closed
6/14/2010	10:09:03 PM	SiCl4 pre valve closed
6/14/2010	10:09:03 PM	SiCl4 post valve closed
6/14/2010	10:09:03 PM	Main Vac valve closed
6/14/2010	10:09:03 PM	Bypass valve closed
6/14/2010	10:09:03 PM	Bubbler valve closed
6/14/2010	10:09:03 PM	H2 valve opened
6/14/2010	10:09:03 PM	Helium MFC set to  0.000000
6/14/2010	10:09:03 PM	H2 MFC set to  500.000000
6/14/2010	10:09:04 PM	BCl3 MFC set to  0.000000
6/14/2010	10:09:04 PM	PHl3 MFC set to  0.000000
6/14/2010	10:09:04 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:09:04 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:09:04 PM	Tube furnace set to 0
6/14/2010	10:10:26 PM	Helium valve closed
6/14/2010	10:10:26 PM	BCl3 valve closed
6/14/2010	10:10:26 PM	PH3 valve closed
6/14/2010	10:10:26 PM	SiCl4 pre valve closed
6/14/2010	10:10:26 PM	SiCl4 post valve closed
6/14/2010	10:10:26 PM	Main Vac valve closed
6/14/2010	10:10:26 PM	Bypass valve closed
6/14/2010	10:10:26 PM	H2 valve opened
6/14/2010	10:10:26 PM	Bubbler valve opened
6/14/2010	10:10:26 PM	Helium MFC set to  0.000000
6/14/2010	10:10:26 PM	H2 MFC set to  500.000000
6/14/2010	10:10:26 PM	BCl3 MFC set to  0.000000
6/14/2010	10:10:26 PM	PHl3 MFC set to  0.000000
6/14/2010	10:10:26 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:10:26 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:10:26 PM	Tube furnace set to 1000
6/14/2010	10:17:47 PM	Run aborted at 10:17 PM
6/14/2010	10:17:47 PM	Helium valve closed
6/14/2010	10:17:47 PM	H2 valve closed
6/14/2010	10:17:47 PM	BCl3 valve closed
6/14/2010	10:17:47 PM	PH3 valve closed
6/14/2010	10:17:47 PM	SiCl4 pre valve closed
6/14/2010	10:17:47 PM	SiCl4 post valve closed
6/14/2010	10:17:47 PM	Bypass valve closed
6/14/2010	10:17:47 PM	Main Vac valve closed
6/14/2010	10:17:47 PM	Bubbler valve closed
6/14/2010	10:17:47 PM	Helium MFC set to  0.000000
6/14/2010	10:17:47 PM	H2 MFC set to  0.000000
6/14/2010	10:17:47 PM	BCl3 MFC set to  0.000000
6/14/2010	10:17:47 PM	PHl3 MFC set to  0.000000
6/14/2010	10:17:47 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:17:47 PM	Tube furnace set to 0
6/14/2010	10:17:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	10:17:51 PM	Recipe started at 10:17 PM
6/14/2010	10:17:51 PM	Helium valve closed
6/14/2010	10:17:51 PM	H2 valve closed
6/14/2010	10:17:51 PM	BCl3 valve closed
6/14/2010	10:17:51 PM	PH3 valve closed
6/14/2010	10:17:51 PM	SiCl4 pre valve closed
6/14/2010	10:17:51 PM	SiCl4 post valve closed
6/14/2010	10:17:51 PM	Main Vac valve closed
6/14/2010	10:17:51 PM	Bubbler valve closed
6/14/2010	10:17:51 PM	Bypass valve opened
6/14/2010	10:17:51 PM	Helium MFC set to  0.000000
6/14/2010	10:17:51 PM	H2 MFC set to  0.000000
6/14/2010	10:17:51 PM	BCl3 MFC set to  0.000000
6/14/2010	10:17:51 PM	PHl3 MFC set to  0.000000
6/14/2010	10:17:51 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:17:51 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:17:51 PM	Tube furnace set to 0
6/14/2010	10:18:12 PM	Helium valve closed
6/14/2010	10:18:12 PM	H2 valve closed
6/14/2010	10:18:12 PM	BCl3 valve closed
6/14/2010	10:18:12 PM	PH3 valve closed
6/14/2010	10:18:12 PM	SiCl4 pre valve closed
6/14/2010	10:18:12 PM	SiCl4 post valve closed
6/14/2010	10:18:12 PM	Bubbler valve closed
6/14/2010	10:18:12 PM	Main Vac valve opened
6/14/2010	10:18:12 PM	Bypass valve opened
6/14/2010	10:18:12 PM	Helium MFC set to  0.000000
6/14/2010	10:18:12 PM	H2 MFC set to  0.000000
6/14/2010	10:18:12 PM	BCl3 MFC set to  0.000000
6/14/2010	10:18:12 PM	PHl3 MFC set to  0.000000
6/14/2010	10:18:12 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:18:12 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:18:12 PM	Tube furnace set to 0
6/14/2010	10:18:12 PM	Run finished at 10:18 PM
6/14/2010	10:18:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	10:21:03 PM	Recipe started at 10:21 PM
6/14/2010	10:21:03 PM	Helium valve closed
6/14/2010	10:21:03 PM	BCl3 valve closed
6/14/2010	10:21:03 PM	PH3 valve closed
6/14/2010	10:21:03 PM	SiCl4 pre valve closed
6/14/2010	10:21:03 PM	SiCl4 post valve closed
6/14/2010	10:21:03 PM	Main Vac valve closed
6/14/2010	10:21:03 PM	Bypass valve closed
6/14/2010	10:21:03 PM	Bubbler valve closed
6/14/2010	10:21:03 PM	H2 valve opened
6/14/2010	10:21:03 PM	Helium MFC set to  0.000000
6/14/2010	10:21:03 PM	H2 MFC set to  500.000000
6/14/2010	10:21:03 PM	BCl3 MFC set to  0.000000
6/14/2010	10:21:03 PM	PHl3 MFC set to  0.000000
6/14/2010	10:21:03 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:21:03 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:21:04 PM	Tube furnace set to 0
6/14/2010	10:22:25 PM	Helium valve closed
6/14/2010	10:22:25 PM	BCl3 valve closed
6/14/2010	10:22:25 PM	PH3 valve closed
6/14/2010	10:22:25 PM	SiCl4 pre valve closed
6/14/2010	10:22:25 PM	SiCl4 post valve closed
6/14/2010	10:22:25 PM	Main Vac valve closed
6/14/2010	10:22:25 PM	Bypass valve closed
6/14/2010	10:22:25 PM	H2 valve opened
6/14/2010	10:22:25 PM	Bubbler valve opened
6/14/2010	10:22:25 PM	Helium MFC set to  0.000000
6/14/2010	10:22:25 PM	H2 MFC set to  500.000000
6/14/2010	10:22:25 PM	BCl3 MFC set to  0.000000
6/14/2010	10:22:25 PM	PHl3 MFC set to  0.000000
6/14/2010	10:22:25 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:22:25 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:22:25 PM	Tube furnace set to 1000
6/14/2010	10:42:25 PM	Helium valve closed
6/14/2010	10:42:25 PM	BCl3 valve closed
6/14/2010	10:42:25 PM	Main Vac valve closed
6/14/2010	10:42:25 PM	Bypass valve closed
6/14/2010	10:42:25 PM	H2 valve opened
6/14/2010	10:42:25 PM	PH3 valve opened
6/14/2010	10:42:25 PM	SiCl4 pre valve opened
6/14/2010	10:42:25 PM	SiCl4 post valve opened
6/14/2010	10:42:25 PM	Bubbler valve opened
6/14/2010	10:42:25 PM	Helium MFC set to  0.000000
6/14/2010	10:42:25 PM	H2 MFC set to  500.000000
6/14/2010	10:42:25 PM	BCl3 MFC set to  0.000000
6/14/2010	10:42:25 PM	PHl3 MFC set to  1.000000
6/14/2010	10:42:25 PM	SiCl4 MFC set to  50.000000
6/14/2010	10:42:25 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:42:25 PM	Tube furnace set to 1000
6/14/2010	10:54:56 PM	Run aborted at 10:54 PM
6/14/2010	10:54:56 PM	Helium valve closed
6/14/2010	10:54:56 PM	H2 valve closed
6/14/2010	10:54:56 PM	BCl3 valve closed
6/14/2010	10:54:56 PM	PH3 valve closed
6/14/2010	10:54:56 PM	SiCl4 pre valve closed
6/14/2010	10:54:56 PM	SiCl4 post valve closed
6/14/2010	10:54:56 PM	Bypass valve closed
6/14/2010	10:54:56 PM	Main Vac valve closed
6/14/2010	10:54:56 PM	Bubbler valve closed
6/14/2010	10:54:56 PM	Helium MFC set to  0.000000
6/14/2010	10:54:56 PM	H2 MFC set to  0.000000
6/14/2010	10:54:56 PM	BCl3 MFC set to  0.000000
6/14/2010	10:54:56 PM	PHl3 MFC set to  0.000000
6/14/2010	10:54:56 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:54:56 PM	Tube furnace set to 0
6/14/2010	10:55:45 PM	Recipe started at 10:55 PM
6/14/2010	10:55:45 PM	Helium valve closed
6/14/2010	10:55:45 PM	BCl3 valve closed
6/14/2010	10:55:45 PM	PH3 valve closed
6/14/2010	10:55:45 PM	SiCl4 pre valve closed
6/14/2010	10:55:45 PM	SiCl4 post valve closed
6/14/2010	10:55:45 PM	Main Vac valve closed
6/14/2010	10:55:45 PM	Bypass valve closed
6/14/2010	10:55:45 PM	Bubbler valve closed
6/14/2010	10:55:45 PM	H2 valve opened
6/14/2010	10:55:45 PM	Helium MFC set to  0.000000
6/14/2010	10:55:45 PM	H2 MFC set to  500.000000
6/14/2010	10:55:45 PM	BCl3 MFC set to  0.000000
6/14/2010	10:55:45 PM	PHl3 MFC set to  0.000000
6/14/2010	10:55:45 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:55:45 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:55:45 PM	Tube furnace set to 0
6/14/2010	10:55:45 PM	Helium valve closed
6/14/2010	10:55:45 PM	BCl3 valve closed
6/14/2010	10:55:45 PM	PH3 valve closed
6/14/2010	10:55:45 PM	SiCl4 pre valve closed
6/14/2010	10:55:45 PM	SiCl4 post valve closed
6/14/2010	10:55:45 PM	Main Vac valve closed
6/14/2010	10:55:45 PM	Bypass valve closed
6/14/2010	10:55:45 PM	H2 valve opened
6/14/2010	10:55:45 PM	Bubbler valve opened
6/14/2010	10:55:45 PM	Helium MFC set to  0.000000
6/14/2010	10:55:45 PM	H2 MFC set to  500.000000
6/14/2010	10:55:45 PM	BCl3 MFC set to  0.000000
6/14/2010	10:55:45 PM	PHl3 MFC set to  0.000000
6/14/2010	10:55:45 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:55:45 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:55:45 PM	Tube furnace set to 1000
6/14/2010	10:55:55 PM	Run aborted at 10:55 PM
6/14/2010	10:55:55 PM	Helium valve closed
6/14/2010	10:55:55 PM	H2 valve closed
6/14/2010	10:55:55 PM	BCl3 valve closed
6/14/2010	10:55:55 PM	PH3 valve closed
6/14/2010	10:55:55 PM	SiCl4 pre valve closed
6/14/2010	10:55:55 PM	SiCl4 post valve closed
6/14/2010	10:55:55 PM	Bypass valve closed
6/14/2010	10:55:55 PM	Main Vac valve closed
6/14/2010	10:55:55 PM	Bubbler valve closed
6/14/2010	10:55:55 PM	Helium MFC set to  0.000000
6/14/2010	10:55:55 PM	H2 MFC set to  0.000000
6/14/2010	10:55:55 PM	BCl3 MFC set to  0.000000
6/14/2010	10:55:55 PM	PHl3 MFC set to  0.000000
6/14/2010	10:55:55 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:55:55 PM	Tube furnace set to 0
6/14/2010	10:58:00 PM	Recipe started at 10:57 PM
6/14/2010	10:58:00 PM	Helium valve closed
6/14/2010	10:58:00 PM	BCl3 valve closed
6/14/2010	10:58:00 PM	PH3 valve closed
6/14/2010	10:58:00 PM	SiCl4 pre valve closed
6/14/2010	10:58:00 PM	SiCl4 post valve closed
6/14/2010	10:58:00 PM	Main Vac valve closed
6/14/2010	10:58:00 PM	Bypass valve closed
6/14/2010	10:58:00 PM	Bubbler valve closed
6/14/2010	10:58:00 PM	H2 valve opened
6/14/2010	10:58:00 PM	Helium MFC set to  0.000000
6/14/2010	10:58:00 PM	H2 MFC set to  500.000000
6/14/2010	10:58:00 PM	BCl3 MFC set to  0.000000
6/14/2010	10:58:00 PM	PHl3 MFC set to  0.000000
6/14/2010	10:58:00 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:58:00 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:58:00 PM	Tube furnace set to 0
6/14/2010	10:58:01 PM	Helium valve closed
6/14/2010	10:58:01 PM	BCl3 valve closed
6/14/2010	10:58:01 PM	PH3 valve closed
6/14/2010	10:58:01 PM	SiCl4 pre valve closed
6/14/2010	10:58:01 PM	SiCl4 post valve closed
6/14/2010	10:58:01 PM	Main Vac valve closed
6/14/2010	10:58:01 PM	Bypass valve closed
6/14/2010	10:58:01 PM	H2 valve opened
6/14/2010	10:58:01 PM	Bubbler valve opened
6/14/2010	10:58:01 PM	Helium MFC set to  0.000000
6/14/2010	10:58:01 PM	H2 MFC set to  500.000000
6/14/2010	10:58:01 PM	BCl3 MFC set to  0.000000
6/14/2010	10:58:01 PM	PHl3 MFC set to  0.000000
6/14/2010	10:58:01 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:58:01 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:58:01 PM	Tube furnace set to 1000
6/14/2010	10:58:09 PM	Run aborted at 10:58 PM
6/14/2010	10:58:09 PM	Helium valve closed
6/14/2010	10:58:09 PM	H2 valve closed
6/14/2010	10:58:09 PM	BCl3 valve closed
6/14/2010	10:58:09 PM	PH3 valve closed
6/14/2010	10:58:09 PM	SiCl4 pre valve closed
6/14/2010	10:58:09 PM	SiCl4 post valve closed
6/14/2010	10:58:09 PM	Bypass valve closed
6/14/2010	10:58:09 PM	Main Vac valve closed
6/14/2010	10:58:09 PM	Bubbler valve closed
6/14/2010	10:58:09 PM	Helium MFC set to  0.000000
6/14/2010	10:58:09 PM	H2 MFC set to  0.000000
6/14/2010	10:58:09 PM	BCl3 MFC set to  0.000000
6/14/2010	10:58:09 PM	PHl3 MFC set to  0.000000
6/14/2010	10:58:09 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:58:09 PM	Tube furnace set to 0
6/14/2010	10:59:42 PM	Recipe started at 10:59 PM
6/14/2010	10:59:42 PM	Helium valve closed
6/14/2010	10:59:42 PM	BCl3 valve closed
6/14/2010	10:59:42 PM	PH3 valve closed
6/14/2010	10:59:42 PM	SiCl4 pre valve closed
6/14/2010	10:59:42 PM	SiCl4 post valve closed
6/14/2010	10:59:42 PM	Main Vac valve closed
6/14/2010	10:59:42 PM	Bypass valve closed
6/14/2010	10:59:42 PM	Bubbler valve closed
6/14/2010	10:59:42 PM	H2 valve opened
6/14/2010	10:59:42 PM	Helium MFC set to  0.000000
6/14/2010	10:59:42 PM	H2 MFC set to  500.000000
6/14/2010	10:59:42 PM	BCl3 MFC set to  0.000000
6/14/2010	10:59:42 PM	PHl3 MFC set to  0.000000
6/14/2010	10:59:42 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:59:42 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:59:42 PM	Tube furnace set to 0
6/14/2010	10:59:42 PM	Helium valve closed
6/14/2010	10:59:42 PM	BCl3 valve closed
6/14/2010	10:59:42 PM	PH3 valve closed
6/14/2010	10:59:42 PM	SiCl4 pre valve closed
6/14/2010	10:59:42 PM	SiCl4 post valve closed
6/14/2010	10:59:42 PM	Main Vac valve closed
6/14/2010	10:59:42 PM	Bypass valve closed
6/14/2010	10:59:42 PM	H2 valve opened
6/14/2010	10:59:42 PM	Bubbler valve opened
6/14/2010	10:59:42 PM	Helium MFC set to  0.000000
6/14/2010	10:59:42 PM	H2 MFC set to  500.000000
6/14/2010	10:59:42 PM	BCl3 MFC set to  0.000000
6/14/2010	10:59:42 PM	PHl3 MFC set to  0.000000
6/14/2010	10:59:42 PM	SiCl4 MFC set to  0.000000
6/14/2010	10:59:42 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	10:59:43 PM	Tube furnace set to 1000
6/14/2010	11:12:06 PM	Run aborted at 11:12 PM
6/14/2010	11:12:06 PM	Helium valve closed
6/14/2010	11:12:06 PM	H2 valve closed
6/14/2010	11:12:06 PM	BCl3 valve closed
6/14/2010	11:12:06 PM	PH3 valve closed
6/14/2010	11:12:06 PM	SiCl4 pre valve closed
6/14/2010	11:12:06 PM	SiCl4 post valve closed
6/14/2010	11:12:06 PM	Bypass valve closed
6/14/2010	11:12:06 PM	Main Vac valve closed
6/14/2010	11:12:06 PM	Bubbler valve closed
6/14/2010	11:12:06 PM	Helium MFC set to  0.000000
6/14/2010	11:12:06 PM	H2 MFC set to  0.000000
6/14/2010	11:12:06 PM	BCl3 MFC set to  0.000000
6/14/2010	11:12:06 PM	PHl3 MFC set to  0.000000
6/14/2010	11:12:06 PM	SiCl4 MFC set to  0.000000
6/14/2010	11:12:06 PM	Tube furnace set to 0
6/14/2010	11:18:45 PM	Recipe started at 11:18 PM
6/14/2010	11:18:45 PM	Helium valve closed
6/14/2010	11:18:45 PM	BCl3 valve closed
6/14/2010	11:18:45 PM	PH3 valve closed
6/14/2010	11:18:45 PM	SiCl4 pre valve closed
6/14/2010	11:18:45 PM	SiCl4 post valve closed
6/14/2010	11:18:45 PM	Main Vac valve closed
6/14/2010	11:18:45 PM	Bypass valve closed
6/14/2010	11:18:45 PM	Bubbler valve closed
6/14/2010	11:18:45 PM	H2 valve opened
6/14/2010	11:18:45 PM	Helium MFC set to  0.000000
6/14/2010	11:18:45 PM	H2 MFC set to  500.000000
6/14/2010	11:18:45 PM	BCl3 MFC set to  0.000000
6/14/2010	11:18:45 PM	PHl3 MFC set to  0.000000
6/14/2010	11:18:45 PM	SiCl4 MFC set to  0.000000
6/14/2010	11:18:45 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:18:45 PM	Tube furnace set to 0
6/14/2010	11:18:47 PM	Helium valve closed
6/14/2010	11:18:47 PM	BCl3 valve closed
6/14/2010	11:18:47 PM	PH3 valve closed
6/14/2010	11:18:47 PM	SiCl4 pre valve closed
6/14/2010	11:18:47 PM	SiCl4 post valve closed
6/14/2010	11:18:47 PM	Main Vac valve closed
6/14/2010	11:18:47 PM	Bypass valve closed
6/14/2010	11:18:47 PM	H2 valve opened
6/14/2010	11:18:47 PM	Bubbler valve opened
6/14/2010	11:18:47 PM	Helium MFC set to  0.000000
6/14/2010	11:18:47 PM	H2 MFC set to  500.000000
6/14/2010	11:18:47 PM	BCl3 MFC set to  0.000000
6/14/2010	11:18:47 PM	PHl3 MFC set to  0.000000
6/14/2010	11:18:47 PM	SiCl4 MFC set to  0.000000
6/14/2010	11:18:47 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:18:47 PM	Tube furnace set to 1000
6/14/2010	11:19:38 PM	Run aborted at 11:19 PM
6/14/2010	11:19:38 PM	Helium valve closed
6/14/2010	11:19:38 PM	H2 valve closed
6/14/2010	11:19:38 PM	BCl3 valve closed
6/14/2010	11:19:38 PM	PH3 valve closed
6/14/2010	11:19:38 PM	SiCl4 pre valve closed
6/14/2010	11:19:38 PM	SiCl4 post valve closed
6/14/2010	11:19:38 PM	Bypass valve closed
6/14/2010	11:19:38 PM	Main Vac valve closed
6/14/2010	11:19:38 PM	Bubbler valve closed
6/14/2010	11:19:38 PM	Helium MFC set to  0.000000
6/14/2010	11:19:38 PM	H2 MFC set to  0.000000
6/14/2010	11:19:38 PM	BCl3 MFC set to  0.000000
6/14/2010	11:19:38 PM	PHl3 MFC set to  0.000000
6/14/2010	11:19:38 PM	SiCl4 MFC set to  0.000000
6/14/2010	11:19:39 PM	Tube furnace set to 0
6/14/2010	11:22:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	11:22:52 PM	Recipe started at 11:22 PM
6/14/2010	11:22:52 PM	Helium valve closed
6/14/2010	11:22:52 PM	H2 valve closed
6/14/2010	11:22:52 PM	BCl3 valve closed
6/14/2010	11:22:52 PM	PH3 valve closed
6/14/2010	11:22:52 PM	SiCl4 pre valve closed
6/14/2010	11:22:52 PM	SiCl4 post valve closed
6/14/2010	11:22:52 PM	Main Vac valve closed
6/14/2010	11:22:52 PM	Bubbler valve closed
6/14/2010	11:22:52 PM	Bypass valve opened
6/14/2010	11:22:52 PM	Helium MFC set to  0.000000
6/14/2010	11:22:52 PM	H2 MFC set to  0.000000
6/14/2010	11:22:52 PM	BCl3 MFC set to  0.000000
6/14/2010	11:22:52 PM	PHl3 MFC set to  0.000000
6/14/2010	11:22:52 PM	SiCl4 MFC set to  0.000000
6/14/2010	11:22:52 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:22:52 PM	Tube furnace set to 0
6/14/2010	11:23:35 PM	Helium valve closed
6/14/2010	11:23:35 PM	H2 valve closed
6/14/2010	11:23:35 PM	BCl3 valve closed
6/14/2010	11:23:35 PM	PH3 valve closed
6/14/2010	11:23:35 PM	SiCl4 pre valve closed
6/14/2010	11:23:35 PM	SiCl4 post valve closed
6/14/2010	11:23:35 PM	Bubbler valve closed
6/14/2010	11:23:35 PM	Main Vac valve opened
6/14/2010	11:23:35 PM	Bypass valve opened
6/14/2010	11:23:35 PM	Helium MFC set to  0.000000
6/14/2010	11:23:35 PM	H2 MFC set to  0.000000
6/14/2010	11:23:35 PM	BCl3 MFC set to  0.000000
6/14/2010	11:23:35 PM	PHl3 MFC set to  0.000000
6/14/2010	11:23:35 PM	SiCl4 MFC set to  0.000000
6/14/2010	11:23:35 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:23:35 PM	Tube furnace set to 0
6/14/2010	11:23:36 PM	Run finished at 11:23 PM
6/14/2010	11:23:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	11:23:56 PM	Helium MFC set to  75.000000
6/14/2010	11:23:57 PM	Helium valve opened
6/14/2010	11:27:34 PM	Helium valve closed
6/14/2010	11:28:02 PM	Recipe started at 11:28 PM
6/14/2010	11:28:02 PM	Helium valve closed
6/14/2010	11:28:02 PM	BCl3 valve closed
6/14/2010	11:28:02 PM	PH3 valve closed
6/14/2010	11:28:02 PM	SiCl4 pre valve closed
6/14/2010	11:28:02 PM	SiCl4 post valve closed
6/14/2010	11:28:02 PM	Main Vac valve closed
6/14/2010	11:28:02 PM	Bypass valve closed
6/14/2010	11:28:02 PM	Bubbler valve closed
6/14/2010	11:28:02 PM	H2 valve opened
6/14/2010	11:28:02 PM	Helium MFC set to  0.000000
6/14/2010	11:28:02 PM	H2 MFC set to  500.000000
6/14/2010	11:28:02 PM	BCl3 MFC set to  0.000000
6/14/2010	11:28:02 PM	PHl3 MFC set to  0.000000
6/14/2010	11:28:02 PM	SiCl4 MFC set to  0.000000
6/14/2010	11:28:02 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:28:02 PM	Tube furnace set to 0
6/14/2010	11:29:24 PM	Helium valve closed
6/14/2010	11:29:24 PM	BCl3 valve closed
6/14/2010	11:29:24 PM	PH3 valve closed
6/14/2010	11:29:24 PM	SiCl4 pre valve closed
6/14/2010	11:29:24 PM	SiCl4 post valve closed
6/14/2010	11:29:24 PM	Main Vac valve closed
6/14/2010	11:29:24 PM	Bypass valve closed
6/14/2010	11:29:24 PM	H2 valve opened
6/14/2010	11:29:24 PM	Bubbler valve opened
6/14/2010	11:29:24 PM	Helium MFC set to  0.000000
6/14/2010	11:29:24 PM	H2 MFC set to  500.000000
6/14/2010	11:29:24 PM	BCl3 MFC set to  0.000000
6/14/2010	11:29:24 PM	PHl3 MFC set to  0.000000
6/14/2010	11:29:24 PM	SiCl4 MFC set to  0.000000
6/14/2010	11:29:24 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:29:24 PM	Tube furnace set to 1000
6/14/2010	11:30:12 PM	Run aborted at 11:30 PM
6/14/2010	11:30:12 PM	Helium valve closed
6/14/2010	11:30:12 PM	H2 valve closed
6/14/2010	11:30:12 PM	BCl3 valve closed
6/14/2010	11:30:12 PM	PH3 valve closed
6/14/2010	11:30:12 PM	SiCl4 pre valve closed
6/14/2010	11:30:12 PM	SiCl4 post valve closed
6/14/2010	11:30:12 PM	Bypass valve closed
6/14/2010	11:30:12 PM	Main Vac valve closed
6/14/2010	11:30:12 PM	Bubbler valve closed
6/14/2010	11:30:12 PM	Helium MFC set to  0.000000
6/14/2010	11:30:12 PM	H2 MFC set to  0.000000
6/14/2010	11:30:12 PM	BCl3 MFC set to  0.000000
6/14/2010	11:30:12 PM	PHl3 MFC set to  0.000000
6/14/2010	11:30:12 PM	SiCl4 MFC set to  0.000000
6/14/2010	11:30:12 PM	Tube furnace set to 0
6/14/2010	11:30:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	11:30:21 PM	Recipe started at 11:30 PM
6/14/2010	11:30:21 PM	Helium valve closed
6/14/2010	11:30:21 PM	H2 valve closed
6/14/2010	11:30:21 PM	BCl3 valve closed
6/14/2010	11:30:21 PM	PH3 valve closed
6/14/2010	11:30:21 PM	SiCl4 pre valve closed
6/14/2010	11:30:21 PM	SiCl4 post valve closed
6/14/2010	11:30:21 PM	Main Vac valve closed
6/14/2010	11:30:21 PM	Bubbler valve closed
6/14/2010	11:30:21 PM	Bypass valve opened
6/14/2010	11:30:21 PM	Helium MFC set to  0.000000
6/14/2010	11:30:21 PM	H2 MFC set to  0.000000
6/14/2010	11:30:21 PM	BCl3 MFC set to  0.000000
6/14/2010	11:30:21 PM	PHl3 MFC set to  0.000000
6/14/2010	11:30:21 PM	SiCl4 MFC set to  0.000000
6/14/2010	11:30:21 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:30:21 PM	Tube furnace set to 0
6/14/2010	11:30:41 PM	Helium valve closed
6/14/2010	11:30:41 PM	H2 valve closed
6/14/2010	11:30:41 PM	BCl3 valve closed
6/14/2010	11:30:41 PM	PH3 valve closed
6/14/2010	11:30:41 PM	SiCl4 pre valve closed
6/14/2010	11:30:41 PM	SiCl4 post valve closed
6/14/2010	11:30:41 PM	Bubbler valve closed
6/14/2010	11:30:41 PM	Main Vac valve opened
6/14/2010	11:30:41 PM	Bypass valve opened
6/14/2010	11:30:41 PM	Helium MFC set to  0.000000
6/14/2010	11:30:41 PM	H2 MFC set to  0.000000
6/14/2010	11:30:41 PM	BCl3 MFC set to  0.000000
6/14/2010	11:30:41 PM	PHl3 MFC set to  0.000000
6/14/2010	11:30:41 PM	SiCl4 MFC set to  0.000000
6/14/2010	11:30:41 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:30:41 PM	Tube furnace set to 0
6/14/2010	11:30:42 PM	Run finished at 11:30 PM
6/14/2010	11:30:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/14/2010	11:33:57 PM	Helium MFC set to  75.000000
6/14/2010	11:33:58 PM	Helium valve opened
6/14/2010	11:53:12 PM	Helium valve closed
6/14/2010	11:56:08 PM	Helium valve opened
6/14/2010	11:56:29 PM	Helium valve closed
6/14/2010	11:56:55 PM	Recipe started at 11:56 PM
6/14/2010	11:56:55 PM	Helium valve closed
6/14/2010	11:56:55 PM	BCl3 valve closed
6/14/2010	11:56:55 PM	PH3 valve closed
6/14/2010	11:56:55 PM	SiCl4 pre valve closed
6/14/2010	11:56:55 PM	SiCl4 post valve closed
6/14/2010	11:56:55 PM	Main Vac valve closed
6/14/2010	11:56:55 PM	Bypass valve closed
6/14/2010	11:56:55 PM	Bubbler valve closed
6/14/2010	11:56:55 PM	H2 valve opened
6/14/2010	11:56:55 PM	Helium MFC set to  0.000000
6/14/2010	11:56:55 PM	H2 MFC set to  500.000000
6/14/2010	11:56:55 PM	BCl3 MFC set to  0.000000
6/14/2010	11:56:55 PM	PHl3 MFC set to  0.000000
6/14/2010	11:56:55 PM	SiCl4 MFC set to  0.000000
6/14/2010	11:56:55 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:56:55 PM	Tube furnace set to 0
6/14/2010	11:58:18 PM	Helium valve closed
6/14/2010	11:58:18 PM	BCl3 valve closed
6/14/2010	11:58:18 PM	PH3 valve closed
6/14/2010	11:58:18 PM	SiCl4 pre valve closed
6/14/2010	11:58:18 PM	SiCl4 post valve closed
6/14/2010	11:58:18 PM	Main Vac valve closed
6/14/2010	11:58:18 PM	Bypass valve closed
6/14/2010	11:58:18 PM	H2 valve opened
6/14/2010	11:58:18 PM	Bubbler valve opened
6/14/2010	11:58:18 PM	Helium MFC set to  0.000000
6/14/2010	11:58:18 PM	H2 MFC set to  500.000000
6/14/2010	11:58:18 PM	BCl3 MFC set to  0.000000
6/14/2010	11:58:18 PM	PHl3 MFC set to  0.000000
6/14/2010	11:58:18 PM	SiCl4 MFC set to  0.000000
6/14/2010	11:58:18 PM	Bypass solenoid MFC set to  0.000000
6/14/2010	11:58:18 PM	Tube furnace set to 1000
